In-Process Measuring System for U1tra-Precision Diamond Turned Surface

超精密金刚石车削表面在线测量系统

基本信息

批准号：
01850028
负责人：
MIYOSHI Takashi
金额：
$ 2.62万
依托单位：
Hokkaido University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Developmental Scientific Research (B).
财政年份：
1989
资助国家：
日本
起止时间：
1989 至 1990
项目状态：
已结题

项目摘要

Several non-contact optical techniques have been investigated for the measurement of fine surface roughness. Disadvantages of these techniques are (1) systematic errors of measurements occur, (2) it is rather difficult to apply to in-process measurement and (3) it requires a long time to perform the test.A new optical method based on the Fraunhofer diffraction theory is proposed, in which it is possible to estimate quantitatvely the fine surface roughness on the order of nanometeres of the surfaces generated by ultra-precision diamond turning without disadvantages mentioned above.The results obtained in this paper are summarized as follows :(1) A conventional equation which can accurately estimate the fine diamond turned surface roughness of less than 200nmRmax by measuring the intensity values of Oth-3rd order diffractions is derived from theoretical analysis based on the Fraunhofer diffraction. The Fraunhofer diffraction roughness R corresponding to the surface roughness (Rmax) can be determined from the following equation<<numerical formula>>where I_0-I_3 are intensities of the principal maximum in order of 0-3 diffractions, lambda is light wavelength.(2) From the measurements of surface roughness of a magnetic memory disk as well as various workpieces produced by diamond turning, this proposed Fraunhofer diffraction method makes it possible to measure the surface roughness from 1nm to the maximum 200nmRmax within an error range of 10%.(3) It is possible to evaluate the texture of a magnetic memory disk surface from the distribution map of the average Fraunhofer diffraction roughness during rotation, so that this method will be applied to in-process measurement of the ultra-fine surface roughness during turning operation.(4) This method can be applied to estimate quantitatively both the depth and the width of fine scratches of less than submicron in mirror surfaces, such as a silicon wafer surface.

已经研究了几种非接触式光学技术，以测量细表面粗糙度。这些技术的缺点是（1）发生测量的系统错误，（2）很难应用于过程中的测量值，（3）需要长时间进行测试。一种基于Fraunhofer衍射理论的新光学方法，提出了根据fraunhofer diffraction的范围，可以通过量化量的表面范围来估算n n and的序列，以验证n n and的序列。钻石转弯没有上述缺点。本文获得的结果总结如下：（1）传统方程式可以通过测量基于FraunHhhhhhhhhhhhhhhhhhhhhhhhatractraction的理论分析来准确估算出小于200nmrmax的精细钻石转化的表面粗糙度。可以从以下等式确定与表面粗糙度（RMAX）相对应的Fraunhofer衍射粗糙度R <<数值公式>>其中I_0-I_3是主最大值的强度，按0-3衍射的顺序为0-3衍射，lambda是轻量波长。 Fraunhofer衍射方法使得可以在10％的误差范围内测量从1nm到最大200nmrmax的表面粗糙度。（3）可以评估从旋转过程中平均Fraunhofer衍射的平均衍射性能的磁性记忆盘表面的质地，以便在旋转过程中使用此方法，以便在旋转过程中使用该方法，以便在旋转过程中使用该方法，在旋转过程中进行了4）的效果。用于定量地估算镜面（例如硅晶片表面）中的细小划痕的深度和宽度小于亚subsicron。