Study on high frequency discharge containing oxygen at atmospheric pressure

常压含氧高频放电研究

基本信息

批准号：
16560242
负责人：
KIMURA Takashi
金额：
$ 1.92万
依托单位：
Nagoya Institute of Technology
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
2004
资助国家：
日本
起止时间：
2004 至 2005
项目状态：
已结题

项目摘要

Ozone production efficiency of a planar-disk-type barrier discharge of oxygen using a time-modulated power supply was first investigated. The efficiency obtained using the time-modulated power supply, which was a decreasing function of power injected into the discharge, was higher than that obtained using a C.W. power supply. The optimum on-time required in order to obtain the maximum efficiency corresponded to one period of the sinusoidal voltage, while an off-time of the power supply longer than 10-15 ms was required.Second, electrical and optical measurements on capacitively-coupled radio frequency (13.56 MHz) He/O_2 discharges at atmospheric pressure were carried out. The addition of oxygen to the He discharges varied from 0% to 5%. A distinct change in the dependence of the dissipated power on discharge voltage can be induced in any conditions. The intensity of the 845 nm line emitted from excited oxygen atoms, which was normalized by the intensity of the 750.4 nm line emitted from excited Ar and the ratio of the ground state Ar density to the total density of neutral species, was investigated as a function of the dissipated power, whereas the ozone concentration was detected by the optical absorption at 254 nm. The normalized intensity was approximately proportional to the dissipated power, whereas the ozone density decreased as the power increased. The ozone production in the capacitively coupled RF He/O_2 discharges was compared with that in He/O_2 barrier discharges in order to research the possibility of the RF He/O_2 discharges as the ozone generator. Although the ozone formation efficiency in the RF discharges was lower than that in the barrier discharges, the formation efficiency obtained using a time-modulated RF power supply was drastically improved and its value increased from about 4g/kWh to about 80g/kWh.

首先研究了使用时间调节的电源的平面盘型屏障排放的臭氧生产效率。使用时间调制的电源获得的效率，这是注入放电的电源的降低功能，高于使用C.W.电源获得的电源。为了获得与正弦电压的一个周期相对应的最大效率所需的最佳按时，而电源的起义则需要长于10-15毫秒的时间。第二，电容耦合的射频（13.56 MHz）He/O_2在大气压力下进行了电容耦合的射频（13.56 MHz）。将氧气添加到HE排放量从0％到5％不等。在任何条件下，都可以诱导耗散功率对放电电压的依赖性的明显变化。从激发氧原子发出的845 nm线的强度，该线通过激发AR发出的750.4 nm线的强度归一化，而基态AR密度与中性物种的总密度的比率是根据耗散功率检测到的，而臭氧浓度则根据254 nM nm nm nm nm nm nm nm nm nm nm nm nm nm nm nm nm nmputtion检测。归一化强度与消散功率大致成正比，而随着功率的增加，臭氧密度降低。将电容耦合的RF He/O_2放电中的臭氧产生与He/O_2屏障放电中的排放量进行了比较，以研究RF He/O_2排放作为臭氧发电机的可能性。尽管RF放电中的臭氧形成效率低于屏障排放中的臭氧，但使用时间调节的RF电源获得的形成效率得到了巨大改善，其值从约4G/kWh增加到约80g/kWh。