Film precursors and growth mechanisms of carbon and silicon carbide deposition from gas phase

气相沉积碳和碳化硅的薄膜前驱体和生长机制

基本信息

批准号：
15360421
负责人：
KAWASE Motoaki
金额：
$ 9.79万
依托单位：
KYOTO UNIVERSITY
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
2003
资助国家：
日本
起止时间：
2003 至 2004
项目状态：
已结题

项目摘要

Chemical vapor deposition of pyrolytic carbon was carried out by using a thin tubular CVD reactor at 1010℃ and 50 Torr. In order to investigate the effects of various hydrocarbons formed by complex reactions in the gas phase, deposition experiments from methane, ethane, ethylene, acetylene, propane, propylene, allene, allylene, n-butane, benzene, etc. were conducted. Pyrolytic carbon samples were obtained and the product gas composition was analyzed by micro gas chromatograph. XPS measurement of the sample prepared from propane showed that the sp^3 C-C bond fraction was ca. 70% and few sp^2 C-C bonds were detected. The sample prepared from propylene had a sp^3 fraction of 30%. The sample from allene had a sp^3 fraction of 15%. X-ray diffraction and Raman scattering measurements showed each sample seemed non-crystalline. However, a layered structure was observed by TEM in the pyrolytic carbon samples prepared from benzene, allene, and allylene. The product gas analysis showed the allene … More and allylene fraction in the gas phase was able to reach ca. 5% even when propane was fed to the reactor. The origin of the sp^2 structure observed in the film prepared from propane was thought to be allene and allylene formed in the gas phase. Film precursors in the gas phase seem to determine the structure of the resulting film. Numerical simulation of the gas phase reactions was also carried out by using an elementary reaction database. A procedure to reduce a reaction model consisting of hundreds of elementary reactions to a chemical reaction engineering model that can be used for design purpose was proposed. In the proposed procedure, elementary reactions were first screened by comparing the reaction rates for an actual gas composition, and then the model reduction was made from chemical reaction engineering point of view. From the results of the numerical simulation and gas composition analysis in the experiments, 26 important reactions were extracted from 651 elementary reactions concerning propane pyrolysis. The derived reduced model and the experimental results correlated well. Less

通过使用1010℃和50托尔的薄管状CVD反应器和50托尔进行了热解碳的化学蒸气沉积。为了研究气相中复杂反应形成的各种碳氢化合物的影响，进行了甲烷，乙烯，乙炔，丙烷，丙烷，丙烯，丙烯，丙烯，丙烯，N-丁烷，N-丁烷，苯等的沉积实验。获得热解碳样品，并通过微气相色谱分析产物气体组成。从丙烷制备的样品的XPS测量表明，Sp^3 C-C键馏分大约是。检测到70％和很少的SP^2 C-C键。由丙烯制备的样品的SP^3比例为30％。来自Allene的样本的SP^3比例为15％。显示每个样品的X射线衍射和拉曼散射测量值似乎是非晶体的。然而，在苯，阿琳和艾琳制备的热解碳样品中，TEM观察到了分层结构。产品气体分析显示了Allene…在气相中的更多和Allene分数能够达到Ca。即使丙烷被喂入反应堆，也有5％。在丙烷制备的膜中观察到的Sp^2结构的起源被认为是在气相中形成的艾琳（Allene）。气相中的膜前体似乎决定了所得膜的结构。还使用基本反应数据库进行了气相反应的数值模拟。提出了一种可以用于设计目的的化学反应工程模型的反应模型的程序。在建议的程序中，首先通过比较实际气体组成的反应速率来筛选基本反应，然后从化学反应工程的角度进行模型降低。从实验中数值模拟和气体成分分析的结果来看，从有关丙烷热解的651个基本反应中提取了26个重要反应。得出的还原模型和实验结果良好相关。较少的