Study on Laser Trapping Probe for Measuring Fine Machined 3-D Form with High Aspect Ratio

用于测量高深宽比精加工 3D 形状的激光捕获探针研究

• 批准号: 13450057
• 负责人: TAKAYA Yasuhiro
• 金额: $ 7.87万
• 依托单位: Osaka University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2001
• 资助国家: 日本
• 起止时间: 2001 至 2002
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-13450057/
• 关键词: Micropart; Nano-CMM; Micro-probe; Laser trapping; Optical fiber; Silica particle; Vibro-probe; Radiation pressure; 大気中トラップ; Micropart; Nano-CMM; Micro-probe; Laser trapping; Optical fiber; Silica particle; Vibro-probe; Radiation pressure; 大気中トラップ

We propose a new probing technique for the nano-CMM (Coordinate Measuring Machine) which makes it possible to measure a fine machined 3D form with high aspect ratio. The micro-particle optically trapped at the tip of sharpened optical fiber with the diameter of micrometer order and the length of millimeter order is used as the laser trapping probe.Fundamental studies to establish such a micro-probe technique are carried out based on Finite Difference Time Domain (FDTD) simulations of radiation field at the tip of sharpened optical fiber. Moreover, in order to check basic properties for the micro-probe, the forced vibration technique of a micro-particle is developed.Main results of this study are summarized as follows ;(1) The simulation system based on FDTD method is developed. This system makes it possible to analyse radiation pressure for a small dielectric particle illuminated by the infrared laser light traveling in the optical fiber of which tip is sharpened in the cone shape with … More the tip radius of less than 1 μm.(2) The simulation results make it clear that the force of 0.52 pN/mW is exerted on a silica particle of 5 μm in diameter illuminated by the infrared laser light coming out from the sharpened optical fiber with cone angle of 36 degree. It is possible to sustain a small dielectric particle at the tip of the optical fiber by radiation pressure in air.(3) We propose the new forced vibration technique to investigate fundamental properties as a positional detection probe. The optical system with the modulated Laser Diode (LD) and the Acousto-Optic Deflector (AOD) device is developed. Using the modulated LD laser light, vibration is given to a particle by radiation pressure exerted on it. The AOD device is used for wiggling a particle in lateral direction.(4) We measured a spring constant of the laser trapping probe, which is an important dynamical parameter as a probe for the nano-CMM, using the new forced vibration technique. Resonant frequency of 823 Hz to 870 Hz are obtained from fitting curves for amplitude and phase response with taking account of a spring-damper model. Then the spring constant of 1.4x10^<-5> N/m to 1.6x10^<-5> N/m is determined from the resonant frequency. Less

我们为纳米-CMM（坐标测量机）提出了一种新的探测技术，这使得可以测量具有高纵横比的精细加工3D形式。微粒子在尖锐的光纤尖端的光学上，直径为千分尺阶的直径，毫米级的长度用作激光捕获探针。根据有限的差异时间域（FDTD）在锐化齐全的齐射的辐射范围内，基于有限的差异时间域（FDTD）模拟。此外，为了检查微型探针的基本特性，开发了微颗粒的强制振动技术。该研究的介绍结果如下总结；（1）开发了基于FDTD方法的仿真系统。该系统使得分析辐射压力，以通过在光纤中传播的红色激光照明的小饮食颗粒，其尖端在锥形形状中锐化，而……更多的尖端半径小于1μm。（2）模拟结果清楚地表明，由0.52 pn/mw的二线颗粒施加了液压颗粒，在5μm中发挥了液压颗粒，使得均发动。圆锥角为36度，尖锐的光纤锐化。通过空气中的辐射压力，可以在光纤尖端维持一个小的饮食颗粒。（3）我们提出了新的强制振动技术，以研究基本特性作为位置检测探针。开发了带有调制激光二极管（LD）和声音偏转器（AOD）设备的光学系统。使用调制的LD激光灯，通过在其上执行的辐射压给粒子振动。 AOD设备用于沿侧向摇动粒子。（4）我们使用新的强制振动技术测量了激光捕获探针的弹簧常数，这是一个重要的动态参数作为纳米CMM的探针。从拟合曲线中获得823 Hz至870 Hz的谐振频率，并考虑到弹簧压抑模型的相位响应和相位响应。然后由1.4x10^<-5> N/m至1.6x10^<-5> N/m的弹簧常数从谐振频率确定。较少的