Development of Micromachining Tool Driven by Radiation Pressure

辐射压力驱动微加工刀具的发展

基本信息

批准号：
10555039
负责人：
TAKAYA Yasuhiro
金额：
$ 7.87万
依托单位：
Osaka University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
1998
资助国家：
日本
起止时间：
1998 至 1999
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-10555039/
关键词：
Radiation pressure force Microparts Silicon mold Diamond thin film Machining tool Micromachining Particle Optical torque 円偏光ナノ加工痕 TDFD法光硬化性樹脂

项目摘要

Optical trapping technology, which utilizes radiation pressure to control and manipulate microscopic particles, has been widely used in various fields, such as biology and microchemistry. In this study, we propose that optical trapping technology can also be used in micromachining. Some designed-shaped-particles made of diamond, which can not only be trapped by the trapping force but also rotated by the optical torque, might be used as tools for micro-grinding or polishing. The designed-shaped-particle is used as a micromachining tool driven and controlled by radiation pressure. A simulator has been developed based on our mathematical model and the motion of arbitrary shaped particles exerted primarily by trapping force and optical torque can be defined. A micromachining tool is designed based on simulation results and fabricated by using photolithography techniques. Main results of this study are summarized as follows(1) A designed-tool composed of a fin part and a tool part is propos … More ed. The fin part is geometrically designed for the control of radiation pressure and efficient rotation. The tool part made of diamond has a sharp edge for micromachining.(2) A diamond abrasive grain with arbitrary shape is optically trapped and driven on a silicon wafer surface. The experimental results show that the trapped abrasive grain can be used for micromachining with nanometer order resolution.(3) We confirmed controllable rotation of a silica particle and a diamond abrasive grain trapped using a focused laser beam with circular polarization experimentally. Rotation rate is changeable by changing polarization state.(4) The movement behavior of a designed-tool made of silica trapped in air has been predicted and it has been shown that high rotation speed of 3800 rpm can be achieved when the torque produced by the laser beam is balanced by the drag torque exerted by the surrounding air. This gives a good verification that designed-tool made of silica or diamond trapped by laser beam can be used in nanometer machining.(5) The fabrication process for a designed-tool made of diamond is established based on the photolithograph technique and the diamond thin film deposition. Two sizes of the prototyping are fabricated and evaluated their tolerances and functions. Less

利用辐射压力来控制和操纵微观粒子的光捕获技术已广泛应用于生物学和微化学等各个领域，在这项研究中，我们提出光捕获技术也可以用于微机械加工中。 -由金刚石制成的颗粒不仅可以被捕获力捕获，还可以通过光学扭矩旋转，可以用作微研磨或抛光的工具。基于我们的数学模型开发了一种由辐射压力驱动和控制的微加工工具，并且可以根据模拟结果设计并制造主要由捕获力和光学扭矩施加的任意形状粒子的运动。本研究的主要结果总结如下：（1）提出了一种由翅片部分和工具部分组成的设计工具。翅片部分的几何设计用于控制辐射压力和效率。金刚石制成的工具部件具有锋利的刃口，可用于微加工。(2)在硅片表面上光学捕获并驱动任意形状的金刚石磨粒，实验结果表明捕获的磨粒可用于微加工。 (3)我们通过实验证实了使用圆偏振聚焦激光束捕获的二氧化硅颗粒和金刚石磨粒的可控旋转通过改变偏振可以改变旋转速率。 (4) 预测了由困在空气中的二氧化硅制成的设计工具的运动行为，并表明当激光束产生的扭矩与阻力平衡时，可以实现 3800 rpm 的高旋转速度这很好地验证了激光束捕获的二氧化硅或金刚石设计工具可用于纳米加工。(5)基于金刚石设计工具的制造工艺。光刻法技术和金刚石薄膜沉积制造了两种尺寸的原型并评估了它们的公差和功能。