Development of Micromachining Tool Driven by Radiation Pressure

辐射压力驱动微加工刀具的发展

基本信息

批准号：
10555039
负责人：
TAKAYA Yasuhiro
金额：
$ 7.87万
依托单位：
Osaka University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
1998
资助国家：
日本
起止时间：
1998 至 1999
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-10555039/
关键词：
Radiation pressure force Microparts Silicon mold Diamond thin film Machining tool Micromachining Particle Optical torque 円偏光ナノ加工痕 TDFD法光硬化性樹脂

项目摘要

Optical trapping technology, which utilizes radiation pressure to control and manipulate microscopic particles, has been widely used in various fields, such as biology and microchemistry. In this study, we propose that optical trapping technology can also be used in micromachining. Some designed-shaped-particles made of diamond, which can not only be trapped by the trapping force but also rotated by the optical torque, might be used as tools for micro-grinding or polishing. The designed-shaped-particle is used as a micromachining tool driven and controlled by radiation pressure. A simulator has been developed based on our mathematical model and the motion of arbitrary shaped particles exerted primarily by trapping force and optical torque can be defined. A micromachining tool is designed based on simulation results and fabricated by using photolithography techniques. Main results of this study are summarized as follows(1) A designed-tool composed of a fin part and a tool part is propos … More ed. The fin part is geometrically designed for the control of radiation pressure and efficient rotation. The tool part made of diamond has a sharp edge for micromachining.(2) A diamond abrasive grain with arbitrary shape is optically trapped and driven on a silicon wafer surface. The experimental results show that the trapped abrasive grain can be used for micromachining with nanometer order resolution.(3) We confirmed controllable rotation of a silica particle and a diamond abrasive grain trapped using a focused laser beam with circular polarization experimentally. Rotation rate is changeable by changing polarization state.(4) The movement behavior of a designed-tool made of silica trapped in air has been predicted and it has been shown that high rotation speed of 3800 rpm can be achieved when the torque produced by the laser beam is balanced by the drag torque exerted by the surrounding air. This gives a good verification that designed-tool made of silica or diamond trapped by laser beam can be used in nanometer machining.(5) The fabrication process for a designed-tool made of diamond is established based on the photolithograph technique and the diamond thin film deposition. Two sizes of the prototyping are fabricated and evaluated their tolerances and functions. Less

光学诱捕技术利用辐射压力来控制和操纵微观颗粒，已广泛用于各种领域，例如生物学和微化学。在这项研究中，我们建议光学诱捕技术也可以用于微加工。一些由钻石制成的设计形粒子，不仅可以被捕获力捕获，而且还可以被光扭矩旋转，还可以用作微粒或抛光的工具。设计形的粒子用作微加工工具驱动和由辐射压力控制。已经根据我们的数学模型开发了模拟器，并且可以定义主要是由捕获力和光学扭矩执行的任意形状颗粒的运动。微加工工具的设计基于模拟结果，并通过使用光刻技术制造。这项研究的主要结果总结如下（1）由鳍片部分组成的设计工具，并提出了工具部分。鳍部分是用于控制辐射压力和有效旋转的几何设计。由钻石制成的工具部分具有微加工的锋利边缘。（2）具有任意形状的钻石磨碎谷物是光学捕获的，并在硅晶圆表面上驱动。实验结果表明，被困的磨料可用于以纳米级分辨率进行微加工。（3）我们确认了使用圆形极化的聚焦激光束在实验上使用聚焦的激光束对二氧化硅颗粒的受控旋转和钻石磨料捕获。（4）已经预测了被困在空气中的二氧化硅制成的工具的运动行为可以改变旋转速率，并且已经显示出，当激光束产生的扭矩由周围空气施加的阻力扭矩平衡时，可以达到3800 rpm的高旋转速度。这提供了一个很好的验证，即设计由二氧化硅制成的工具或被激光束捕获的钻石可以在纳米加工中使用。（5）基于光刻技术和钻石薄膜的沉积，建立了由钻石制成的设计工具的制造过程。制造两种尺寸的原型制作并评估了它们的公差和功能。较少的