Study on Multi-scale Nano-measurement of Microparts using Optically Oscillated Microprobe

光振荡微探针多尺度纳米测量研究

基本信息

批准号：
15206016
负责人：
TAKAYA Yasuhiro
金额：
$ 31.87万
依托单位：
Osaka University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (A)
财政年份：
2003
资助国家：
日本
起止时间：
2003 至 2006
项目状态：
已结题

项目摘要

Investigations to establish assessment technologies for nanometer order accuracy of a micropart based on the concept of the nano-CMM (Coordinate Measuring Machine) are summarized as follows ;1.The single-beam gradient-force sustains an optically oscillating microprobe in air. The position sensing method is proposed by introducing a PSD (Position Sensing detector) as an oscillation detector. The change of the damping effect is brought by the thin layer of air between the probe sphere surface and the specimen's surface. The phase delay increases also according to changing of the damping effect close to the specimen's surface. So, the probe detects a position based on the response amplitude reduction together with the phase delay increase.2.To verify the validity of the vibrational probing method, the vibrating conditions such as the amplitude and the phase delay are measured by lateral probing of the as-cleaved silicon wafer edge using a probe sphere with diameter of 8 μm. The measurement results suggest that the proposed probing technique is useful for detecting a lateral position with the actual resolution of finer than 23 nm and the repeatability of 13.7 nm.3.Motion accuracy of the stage system for measuring 3D-coordinate system is evaluated by using a heterodyne laser interferometer of which the wave length of the He-Ne laser is traceable to the standard length. The usefulness of the stage system with positioning resolution of 5 nm and lost-motion accuracy of better than 16 nm is verified for establishing the nano-CMM system.4.In order to estimate total uncertainty for the developed nano-CMM system, three dimensional form measurement. of a standard micro glass sphere of 168 ±8.5 μm in diameter is performed. The diameter is evaluated 162.9 μm. This suggests that the measurement system is effective for micro-form measurement with an accuracy of nanometer order.

基于纳米CMM（坐标测量机）概念建立微型零件纳米级精度评估技术的研究总结如下：1.单光束梯度力在空气中维持光学振荡微探针传感方法。提出了通过引入PSD（位置传感检测器）作为振荡检测器。阻尼效应的变化是由探头球体表面和样本之间的薄层空气带来的。相位延迟也会随着靠近样品表面的阻尼效应的变化而增加，因此，探头根据响应幅度的减小和相位延迟的增加来检测位置。2.验证振动探测的有效性。方法中，使用直径为 8 μm 的探针球体对切割后的硅片边缘进行横向探测，测量振幅和相位延迟等振动条件。测量结果表明，所提出的探测技术可用于检测振动。横向位置，实际分辨率优于23 nm，重复精度为13.7 nm。 3.使用氦氖波长的外差激光干涉仪评估3D坐标系测量平台系统的运动精度。验证了定位分辨率为5 nm、空转精度优于16 nm的平台系统对于建立纳米坐标测量机系统的实用性。为了估计所开发的纳米 CMM 系统的总不确定度，对直径为 168 ±8.5 μm 的标准微玻璃球进行了三维形状测量，评估直径为 162.9 μm。 - 形状测量精度达到纳米级。