The Study on the surface modification of metals by the new nitride or oxide thin films and their spectroscopic evaluation

新型氮化物或氧化物薄膜对金属表面改性的研究及其光谱评价

基本信息

批准号：
10555252
负责人：
NOSE Masateru
金额：
$ 6.85万
依托单位：
Takaoka National College
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
1998
资助国家：
日本
起止时间：
1998 至 2001
项目状态：
已结题

项目摘要

We have investigated the influence of nitrogen and/or oxygen content on the properties of TiN and ZrN thin films using spectrometer and colorimetric analysis as well as usual analytical instruments. The color of the films was evaluated by means of chromaticity coordinate, x and y, and the stimulus value Y. The major conclusions are as follows : (1) The color of ZrN coatings are more sensitive to nitrogen flow, namely to nitrogen partial pressure, than that of TiN coatings. (2) The bright gold-color of ZrN coatings can be obtained by the sputtering even at higher pressure of o.3 Pa. On the other hand, the bright gold color for TiN coatings is made only at the lower pressure of 0.15 Pa. (3) The oxygen content in TiN coatings increases with increasing the argon flow rate (the argon partial pressure). This tendency corresponds to the dependences of luminous reflectance and resistivity on the argon flow rate. These results can be explained from the morphology of the films and the nitrogen and oxygen concentrations.Furthermore, we have studied the influence of Si addition on the structure and the mechanical properties of ZrN thin films. A study of their structure and mechanical properties has provided as follows : (1) With increasing Si content, the hardness of the films increases initially, attaining a maximum hardness at approximately 3%, and then decreases to lower hardness than that of Zr-N binary films. (2) The hardest film containing about 3% Si consists of large crystals in the range of 20 to 25 nm. (3) The increment in hardness of ZrSiN films by silicon addition cannot be explained by the crystal size. (4) Zr-Si-N films containing 3 at% of Si have a possibility of the new decorative coatings with higher hardness and golden color.

我们使用光谱仪和比色分析以及通常的分析仪器研究了氮和/或氧含量对锡和ZRN薄膜特性的影响。膜的颜色通过色度坐标x和y进行评估，刺激值y。主要结论如下：（1）ZRN涂层的颜色对氮流的颜色对氮的含量更敏感，即对氮的部分压力，而不是锡涂层。（2）即使在O.3 pa的较高压力下，ZRN涂层的亮金色也可以通过溅射获得，另一方面，仅在0.15 pa的较低压力下才能制造出锡涂层的明亮金色。这种趋势对应于发光反射率和电阻率对氩气流速的依赖性。这些结果可以从膜的形态以及氮和氧浓度中解释。Furthermore，我们研究了SI添加对ZRN薄膜的结构和机械性能的影响。对其结构和机械性能的研究如下：（1）随着SI含量的增加，膜的硬度最初增加，最大硬度的最大硬度约为3％，然后降低到比ZR-N二元膜的硬度更低。（2）最难的膜包含约3％Si，由20至25 nm的大晶体组成。（3）不能用晶体尺寸来解释硅薄膜硬度的增量。（4）包含3个AT％SI的ZR-SI-N膜具有具有更高硬度和金色的新装饰涂料。