Active Millimeter-Wave On-Wafer Measurement Probe

有源毫米波晶圆上测量探头

• 批准号: 446397162
• 负责人: Professor Dr.-Ing. Dietmar Kissinger
• 金额: --
• 依托单位: Institut für Hochfrequenztechnik und Elektronik (IHE)
• 依托单位国家: 德国
• 项目类别: Research Grants
• 资助国家: 德国
• 项目状态: 未结题
• 来源: https://gepris.dfg.de/gepris/projekt/446397162?language=en
• 关键词: Active; Millimeter; Wave; Wafer; Measurement

The characterization of millimeter-wave integrated circuits (MMICs) requires a highly expensive setup using a network analyzer, frequency extension modules and an on-wafer measurement. The waveguide connecting the on-wafer probe to the extension module, as well as the extension module itself, are significantly limiting factors for the achievable instantaneous frequency range. Hence, a full characterization of a very broadband state-of-the-art MMIC requires an impractical multiple number of measurements with different frequency extension modules and on-wafer probes for the different frequency ranges. In addition, the large size of the extension modules prohibits their use together with probe cards, which includes a high number of probes. This severely limits the development of fast and low-cost verification methods for modern multi-channel radar and communication transceivers.In ActiOnPro we want to explore novel architectures and methodologies for millimeter-wave on-wafer measurement techniques where several frequency extension modules are integrated together with multiplexers into the on-wafer probes. The new architecture will have the following advantages:- Ultra-broad bandwidth from DC to several 100 GHz- No limitation of instantaneous bandwidth by wave-guide bands- Very compact size allowing integration in probe cards or just more flexibility on the probe stationOne very interesting application of the new architecture is to generate a sustainable low-cost extension of an existing DC-110 GHz broadband network analyzer system to DC-220 GHz. In ActiOnPro we will explore the feasibility of the new concept and realize a first demonstration of this DC-220 GHz solution.For this purpose, the latest IHP BiCMOS technology is used to develop frequency extension module circuits consisting of frequency multipliers, mixers, amplifiers and couplers between 110 GHz and 220 GHz. These frequency extension modules are mounted into the probe and all connected to the same probe tip via a multiplexer. In addition, the multiplexer routes low frequency signals from DC to 110 GHz directly to the commercial frequency extension module of the existing vector network analyzer through a 1 mm coax connector. A novel ultra-broadband connector based on coplanar lines will allow replacement of probe tips and thus accommodate the different life time of the probe tip and the rest of the new probe. In parallel to the practical designs a study of the system behavior depending on the number of used frequency bands considering the required chip space, IC performance and the multiplexer’s insertion loss will help to optimize the detailed system architecture. With ActiOnPro all functionalities will be packaged into the probe housing resulting in a compact, fully integrated ultra-broadband on-wafer measurement probe with integrated frequency extension modules.

毫米波集成电路（MMIC）的表征需要使用网络分析仪，频率扩展模块和磁力测量值进行昂贵的设置。将电网探头连接到扩展模块以及扩展模块本身的波导是可实现的瞬时频率范围的显着限制因素。因此，对非常宽带的最先进的MMIC进行了完整表征，需要具有不同频率扩展模块和不同频率范围内的频率扩展模块和磁力问题的不切实际的多次测量值。此外，大尺寸的扩展模块禁止其与探针卡一起使用，其中包括大量问题。这种严重的限制了现代多通道雷达和通信发射机的快速和低成本验证方法的发展。在ActivePro中，我们希望探索新颖的架构和毫米波电网测量技术的方法，其中几个频率扩展模块与多个磁力频率集成在一起。 The new architecture will have the following advantages:- Ultra-broad bandwidth from DC to several 100 GHz- No limit of instantaneous bandwidth by wave-guide bands- Very compact size allowing integration in probe cards or just more flexibility on the probe stationOne very interesting application of the new architecture is to generate a sustainable low-cost extension of an existing DC-110 GHz broadband network analyzer system to DC-220 GHz.在ActionPro中，我们将探讨新概念的可行性，并实现该DC-220 GHz解决方案的首次演示。为此，最新的IHP BICMOS技术用于开发频率扩展模块电路，该模块电路由频率乘数，搅拌机，放大器，放大器和110 GHz和220 GHz之间的频率倍增器，放大器和配置器组成。这些频率扩展模块被安装到探针中，并通过多路复用器连接到相同的探针尖端。此外，多路复用器通过1 mm同轴电缆连接器将低频信号从直流向110 GHz直接路由到现有矢量网络分析仪的商业频率扩展模块。基于共面条线的新型超宽带连接器将允许更换探针尖端，从而适应探针尖端的不同寿命和新探针的其余时间。根据实用设计，根据所需的芯片空间，IC性能和多路复用器的插入损失的使用频带的数量，对系统行为进行了研究，这将有助于优化详细的系统体系结构。使用ActivePro，所有功能都将包装到探针外壳中，从而带有与集成的频率扩展模块的紧凑，完全集成的超宽带测量探头。