Active Millimeter-Wave On-Wafer Measurement Probe

有源毫米波晶圆上测量探头

• 批准号: 446397162
• 负责人: Professor Dr.-Ing. Dietmar Kissinger
• 金额: --
• 依托单位: Institut für Hochfrequenztechnik und Elektronik (IHE)
• 依托单位国家: 德国
• 项目类别: Research Grants
• 资助国家: 德国
• 项目状态: 未结题
• 来源: https://gepris.dfg.de/gepris/projekt/446397162?language=en
• 关键词: Active; Millimeter; Wave; Wafer; Measurement

The characterization of millimeter-wave integrated circuits (MMICs) requires a highly expensive setup using a network analyzer, frequency extension modules and an on-wafer measurement. The waveguide connecting the on-wafer probe to the extension module, as well as the extension module itself, are significantly limiting factors for the achievable instantaneous frequency range. Hence, a full characterization of a very broadband state-of-the-art MMIC requires an impractical multiple number of measurements with different frequency extension modules and on-wafer probes for the different frequency ranges. In addition, the large size of the extension modules prohibits their use together with probe cards, which includes a high number of probes. This severely limits the development of fast and low-cost verification methods for modern multi-channel radar and communication transceivers.In ActiOnPro we want to explore novel architectures and methodologies for millimeter-wave on-wafer measurement techniques where several frequency extension modules are integrated together with multiplexers into the on-wafer probes. The new architecture will have the following advantages:- Ultra-broad bandwidth from DC to several 100 GHz- No limitation of instantaneous bandwidth by wave-guide bands- Very compact size allowing integration in probe cards or just more flexibility on the probe stationOne very interesting application of the new architecture is to generate a sustainable low-cost extension of an existing DC-110 GHz broadband network analyzer system to DC-220 GHz. In ActiOnPro we will explore the feasibility of the new concept and realize a first demonstration of this DC-220 GHz solution.For this purpose, the latest IHP BiCMOS technology is used to develop frequency extension module circuits consisting of frequency multipliers, mixers, amplifiers and couplers between 110 GHz and 220 GHz. These frequency extension modules are mounted into the probe and all connected to the same probe tip via a multiplexer. In addition, the multiplexer routes low frequency signals from DC to 110 GHz directly to the commercial frequency extension module of the existing vector network analyzer through a 1 mm coax connector. A novel ultra-broadband connector based on coplanar lines will allow replacement of probe tips and thus accommodate the different life time of the probe tip and the rest of the new probe. In parallel to the practical designs a study of the system behavior depending on the number of used frequency bands considering the required chip space, IC performance and the multiplexer’s insertion loss will help to optimize the detailed system architecture. With ActiOnPro all functionalities will be packaged into the probe housing resulting in a compact, fully integrated ultra-broadband on-wafer measurement probe with integrated frequency extension modules.

毫米波集成电路（MMIC）的表征需要使用模块上的网络分析仪和电网测量的网络分析仪进行设置。频率。开发现代多通道雷达和通信收发器的快速和低成本验证方法。 - 探测器： - 从DC到几个GHz-no限制瞬时带宽的探针。新的架构是为了在ActionPro中生成现有的DC-11 GHz宽带网络分析仪系统的可持续低成本扩展。目的，最新的IHP BICMOS技术用于开发由频率乘数，混合器，放大器和110 GHz和220 GHz之间的频率延长模块。多路复用器。此外，多路复用器通过1 mm辅助连接器从直流向分析仪进行信号。探测器。 -Broadband带有集成频率扩展模块的磁力测量探头。