Development of Biomimetic Actuator Using Ciliary Movement

利用纤毛运动的仿生致动器的开发

• 批准号: 05452219
• 负责人: OKUMA Shigeru
• 金额: $ 4.67万
• 依托单位: Nagoya University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for General Scientific Research (B)
• 财政年份: 1993
• 资助国家: 日本
• 起止时间: 1993 至 1994
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-05452219/
• 关键词: biomimetic actuator; PVDF thin film; atomic force microscope; ciliary movement; PVDF薄膜

Ciliary movement was mimed by PVDF film actuators. Lithographic process was used to fabricate interdigital electrodes which were made from aluminum thin films evapolated on both sides of the PVDF film. The fabricated PVDF actuator was actuated by applying a source voltage to the fabricated electrodes. Statical characterisities of the fabricated PVDF film actuator were investigated by atomic force microscopy using heterodyne interferometry. Scanning tunneling microscopy was used for atomic scale electrode formation.A multiple probe force microscope was developed to observe displacements of the two position on surface simultaneously. In order to observe displacement distribution on PVDF film actuator, a new accurate microscopy using pulse laser diode was developed. Control methods using fuzzy control and Petri net were discussed to control distributed systems.

PVDF膜执行器模仿睫状运动。光刻工艺用于制造由PVDF膜两侧蒸发的铝薄膜制成的二层电极。制造的PVDF执行器是通过将源电压施加到制造的电极上的。使用异差干涉法研究了原子力显微镜研究制造的PVDF膜执行器的静态特征。扫描隧道显微镜用于原子尺度的形成。开发了多个探针力显微镜，以同时观察两个位置的位移。为了观察PVDF膜执行器上的位移分布，开发了使用脉冲激光二极管的新精确显微镜。讨论了使用模糊控制和培养皿网的控制方法以控制分布式系统。

项目成果

Ken Nakano, Hiroki Yoshida, Kazuhiro Hane, Shigeru Okuma, et al.: "Fringe scanning interferometric imaging of small vibration using pulsed laser diode" J.of SICE. 31 (in printing). (1995)

Ken Nakano、Hiroki Yoshida、Kazuhiro Hane、Shigeru Okuma 等人：“使用脉冲激光二极管对小振动进行条纹扫描干涉成像”J.of SICE。

Akihiro Torii: "Adhesive foke distribution on microstructures investigated by an atomic force microscope" Sensors and Actuators A. 44. 153-158 (1994)

Akihiro Torii：“通过原子力显微镜研究微观结构上的粘合剂焦分布”传感器和执行器 A. 44. 153-158 (1994)

Akihiro Torii: "Multi-Probe Force Microscope for a Precise Linear Encoder" Proc.of the 7th Inter.Precision Eng.,Seminar. 1003-1006 (1993)

Akihiro Torii：“用于精密线性编码器的多探针力显微镜”第七届 Inter.Precision Eng. 研讨会论文集。

Minoru Sasaki,Kazuhiro Hane,Shigeru Okuma他2名: "Improved differential heterodyne interferometer for atomic force microscopy" Review of Scientific Instruments. 65. 3697-3701 (1994)

Minoru Sasaki、Kazuhiro Hane、Shigeru Okuma 和另外 2 人：“用于原子力显微镜的改进的微分外差干涉仪”科学仪器评论 65. 3697-3701 (1994)。

Akihiro Torii,Minoru Sasaki,Kazuhiro Hane,Shigeru Okuma: "Adhesive force distribution on microstructures investigated by an atomic force microscope" Sensors and Actrators A. 44. 153-158 (1994)

Akihiro Torii、Minoru Sasaki、Kazuhiro Hane、Shigeru Okuma：“原子力显微镜研究的微观结构上的粘附力分布”传感器和执行器 A. 44. 153-158 (1994)