Non-equilibrium Surface-Modification of Metals by Laser Irradiation in Various gas Atmospheres

各种气体气氛下激光辐照对金属的非平衡表面改性

基本信息

批准号：
01460222
负责人：
YAMAGUCHI Masaharu
金额：
$ 4.99万
依托单位：
Kyoto University
依托单位国家：
日本
项目类别：
Grant-in-Aid for General Scientific Research (B)
财政年份：
1989
资助国家：
日本
起止时间：
1989 至 1990
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-01460222/
关键词：
Laser irradiation Nitride Oxide Surface Modification Film 薄膜作成窒化物膜酸化物膜

项目摘要

Pure metals (Al, Fe, Nb, Ni, Ti, W and Zr) have been irradiated in air, N_2 and Ar+NH_3 gas using a high-power pulse laser, and surface products have been identified by X-ray diffracto-metry. The results obtained for irradiation at 3x10^9 W/cm^2 can be summarized as follows.(1) W : Even by low-angle X-ray diffractometry, neither peaks corresponding to oxides nor those corresponding to nitrides were identified.(2) Zr and Nb : Diffraction peaks from ZrN were clearly identified for Zr irradiated in N_2 gas and in air. No oxide peak was identified in specimens irradiated in air. In low-angle X-ray diffraction spectra of Nb irradiated in both N_2 and air, small but clear peaks corresponding to Nb_2N are found.(3) Ti and Al : Peaks from TiN were clearly identified for Ti irradiated in N_2 gas and air. A small peak of TiO_2 was also identified in for Ti irradiated in air. The presence of TiO was not clarified since the peak positions of TiO and TiN are almost overlapped. Because the peak positions of TiN are identical for the specimens irradiated in both N_2 gas and air, TiO did not seem to be produced. Formation of AIN was also identified.(4) Fe and Ni : No peaks corresponding to any nitrides or oxides were identified in specimens irradiated in N_2 gas. On Ni irradiated in air, NiO was identified. On Al and Fe irradiated in air, neither oxide nor nitride was identified, even by low-angle X-ray diffractometry. These metals were heavily damaged by irradiation in N_2 gas and air.(5) Nb, Zr, and Ti, which have higher boiling points than 3500 K, about the maximum surface temperature attained by the present laser irradiation, show the formation of nitrides for irradiation in both N_2 and air. On the other hand, nitride formation is not identified for the other metals, Fe, and Ni, with boiling points lower than 3500 K by X-ray diffractometry.

采用高功率脉冲激光在空气、N_2和Ar+NH_3气体中辐照纯金属(Al、Fe、Nb、Ni、Ti、W和Zr)，并通过X射线衍射仪鉴定表面产物。 3x10^9 W/cm^2 照射获得的结果可总结如下。(1) W : 即使通过低角 X 射线衍射法，也没有识别出对应于氧化物的峰和对应于氮化物的峰。(2 ) Zr 和 Nb ：对于在 N_2 气体和空气中照射的 Zr，可以清楚地识别出来自 ZrN 的衍射峰。在空气中辐照的样品中没有发现氧化物峰。在N_2和空气中辐照的Nb的低角X射线衍射谱中，都发现了与Nb_2N相对应的小而清晰的峰。(3)Ti和Al：在N_2气体和空气中辐照的Ti可以清楚地识别出来自TiN的峰。在空气中辐照的Ti 中也发现了TiO_2 的小峰。由于 TiO 和 TiN 的峰位置几乎重叠，因此无法澄清 TiO 的存在。由于在 N_2 气体和空气中辐照的样品中 TiN 的峰位置相同，因此似乎没有产生 TiO。还鉴定出了AlN的形成。(4)Fe和Ni：在N_2气体中辐照的样品中没有鉴定出对应于任何氮化物或氧化物的峰。在空气中照射Ni后，鉴定出NiO。对于在空气中照射的Al和Fe，即使通过小角度X射线衍射法也没有鉴定出氧化物或氮化物。这些金属在N_2气体和空气中受到严重损伤。(5)Nb、Zr和Ti的沸点高于3500 K（大约是目前激光辐照所能达到的最高表面温度），显示出氮化物的形成。 N_2 和空气中的辐照。另一方面，通过 X 射线衍射测定，沸点低于 3500 K 的其他金属 Fe 和 Ni 没有发现氮化物形成。