Development of a Differential Laser Autocollimation Probe for precision measurement of mirror shapes

开发用于精密测量反射镜形状的差分激光自准直探头

• 批准号: 63850028
• 负责人: KAMADA Osamu
• 金额: $ 2.82万
• 依托单位: TOHOKU UNIVERSITY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Developmental Scientific Research
• 财政年份: 1988
• 资助国家: 日本
• 起止时间: 1988 至 1989
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-63850028/
• 关键词: Laser Diode; Autocollimation; Differential Measurement; Mirror Shape; Precision Measurement; On Machine Measurement; オンマシン測定; 鏡面; 精密測定; 走査基準; 迅速測定; レーザオートコリメーション

In order to apply the differential laser autocollimation method to on-machine-measurement, a trial probe is made. The probe has been constructed from two collimated beams of laser diode and a PSD position sensitive device ) located in a focal plane of an objective. The resolution and accuracy of the trial probe is about 1 second.In scanning measurements of cross sectional profiles of mirrors, translatory and angular errors during the scanning notion are canceled remarkably. Measured profiles reproduced with maximum deviation of 0.05 micron under residual vibration due to stepping notion of a scanning table.In order to present 3-dimensional profile, it is necessary to scan in and y-direction of surface by DLAC probe and also to measure relative inclination of at least two curves by using single bean laser autocollimation.It has been shown that parabolic surface mirror and plane mirror with a concave error are able to be measured and displayed by 3- dimensional expression. Reproducibility of measured shapes by resetting a specimen after a turn of 90 degree was realized within deviation of 0.1 micron.

为了将差分激光自准直方法应用于在机测量中，制作了试验探针。该探头由两束准直激光二极管光束和位于物镜焦平面上的 PSD 位置敏感装置构成。试验探头的分辨率和精度约为1秒。在反射镜横截面轮廓的扫描测量中，扫描过程中的平移误差和角度误差被显着消除。由于扫描台的步进概念，在残余振动下，测量的轮廓以 0.05 微米的最大偏差再现。为了呈现 3 维轮廓，需要使用 DLAC 探头扫描表面和 y 方向，并测量相对值利用单光束激光自准直仪测量至少两条曲线的倾角。研究表明，抛物面镜和带有凹面误差的平面镜能够通过三维表达式进行测量和显示。通过在旋转 90 度后重置样本来实现测量形状的再现性，偏差在 0.1 微米以内。

项目成果

鎌田治: "差動レ-ザオ-トコリメ-ションに関する研究" 精密工会会誌.

Osamu Kamata：《差分激光束准直的研究》精密工业协会杂志。

鎌田治: "差動レ-ザオ-トコリメ-ションに関する研究" (精密工学会誌1990年投稿予定).

Osamu Kamata：“差分激光准直的研究”（预定于1990年提交给日本精密工程学会杂志）。

清野慧: "DATUM INTRODUCED BY SOFTWARE METHODS" Int.Conf.on ADVANCED MECHATROCICS,May 21-24,(1989)Tokyo. 467-472 (1989)

Kei Seino：“DATUM INTRODUCED BY SOFTWARE METHODS”Int.Conf.on ADVANCED MECHATROCICS，5 月 21-24 日，(1989) 东京 467-472 (1989)。

清野慧: "DATUM INTRODUCED BY SOFTWARE METHODS" Int.Conf.on ADVANCED MECHATROCICS.May 21-24.(1989)Tokyo. 467-472 (1989)

Kei Seino：“DATUM INTRODUCED BY SOFTWARE METHODS”Int.Conf.on ADVANCED MECHATROCICS。May 21-24。（1989）东京467-472（1989）。

鎌田治: "差動レ-ザオ-トコリメ-ションに関する研究" 精密工学会1989年春期全国大会講演論文集. 149-150 (1989)

Osamu Kamata：“差分激光准直的研究”日本精密工程学会 1989 年春季全国会议论文集 149-150 (1989)。