Development of a new ion-beam sputtering apparatus and its application for scanning electron microscopy.

新型离子束溅射装置的研制及其在扫描电子显微镜中的应用

• 批准号: 59870002
• 负责人: TANAKA Keiichi
• 金额: $ 4.54万
• 依托单位: Tottori University School of Medicine
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Developmental Scientific Research
• 财政年份: 1984
• 资助国家: 日本
• 起止时间: 1984 至 1986
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-59870002/
• 关键词: ion beam; metal deposition; scanning electron microscope; high resolution; ultra fine grain; 白金; 蒸着; 高分解能走査電子顕微鏡

An ion beam sputter coater for high resolution scanning electron microscopy was newly developed. It is equipped with a specimen chamber (an ion beam gun, a specimen stage, metal targets and a thickness monitor), control units and a vacuum system. With this apparatus, very thin metal film which is composed of fine platinum particles of about 15-20 A in diameter was obtained. The size of the particles is much smaller than that obtained by ordinary ion sputter coater (50-60 A in diameter). Tantalum and tungsten can be also used as coating metals. On observation with an ultra high resolution scanning electron microscope, the specimens which had been thinly coated by the new coater provided enough conductivity and yield of secondary electrons for taking pictures in good contrast. Thus the newly developed ion beam sputter coater have very high ability in compare with the ordinary ion sputter coater and it exercises its power at ultra high resolution scanning electron microscopy. In the future, this apparatus surely become a necessary in this research field.

新开发了用于高分辨率扫描电子显微镜的离子束溅射夹。它配备了标本室（离子束枪，标本阶段，金属目标和厚度监视器），控制装置和真空系统。使用此设备，获得了直径约为15-20 a的细铂颗粒组成的非常薄的金属膜。颗粒的尺寸要比普通离子溅射夹（50-60 a直径）所获得的粒子大得多。坦塔尔和钨也可以用作涂料金属。在使用超高分辨率扫描电子显微镜观察时，新座椅薄薄涂层的样品提供了足够的电导率和次级电子的电导率和产量，以对比度对比度。因此，与普通的离子溅射夹相比，新开发的离子束溅射夹具有很高的能力，并且在超高分辨率扫描电子显微镜下行使其功率。将来，该设备在该研究领域肯定是必要的。

项目成果

医生物走査電顕. 14-1. (1985)

医学和生物扫描电子显微镜。14-1。

K. TANAKA, A. MITSUSHIMA and K. MORI: "A new apparatus of ion-beam sputtering deposition for electron microscopy." Biomedical SEM. 13. 15-16 (1984)

K. TANAKA、A. MITSUSHIMA 和 K. MORI：“一种用于电子显微镜的离子束溅射沉积的新装置。”

A. MITSUSHIMA, K.TANAKA and K. MORI: "An experiment on ion-beam deposition --Pt grain siz and its applicability for SEM" Biomedical SEM. 14. 60-61 (1985)

A. MITSUSHIMA、K.TANAKA 和 K. MORI：“离子束沉积实验——Pt 晶粒尺寸及其对 SEM 的适用性”生物医学 SEM。

田中敬一,満嶋明,森金太郎: 14. 60-63 (1985)

田中敬一、满岛晃、森金太郎：14. 60-63 (1985)

田中敬一,満嶋明,森金太郎: 医生物走査電顕. 13. 15-16 (1984)

Keiichi Tanaka、Akira Mitsushima、Kintaro Mori：医学和生物扫描电子显微镜。13. 15-16 (1984)