Ultra-Precision Vertical Spindle Grinder for Ceramics

超精密陶瓷立式主轴磨床

基本信息

批准号：
59850028
负责人：
NAMBA Yoshiharu
金额：
$ 5.89万
依托单位：
Osaka University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Developmental Scientific Research
财政年份：
1984
资助国家：
日本
起止时间：
1984 至 1985
项目状态：
已结题

项目摘要

Single crystals and glass ceramics of zero thermal expansion coefficient are expected to be machined ultra-precisely in near future. These materials have been lapped and polished because of their brittle mechanical properties. This research intends to develop a new ultra-precision vertical spindle grinder which can finish ceramic materials into flat mirror surfaces having sub-micron in dimensional accuracy. It is the most important to control the thermal expansion of materials to be ground, a grinding wheel and machine tool for getting the sub-micron accuracy in grinding process. This research tried to reduce such thermal expansion by two methods, that is, using of glass ceramics of zerothermal expansion coefficient as a material of a grinding wheel spindle and controlling the temperatures in room, grinding water and hydrostatic pressure oil for making the temperatures of a machine tool, grinding wheel and workpiece uniform. No body has developed a glass ceramic spindle because of brittleness and expensive cost for machining. By development of new casting ＆ heat treating processes and examination of grindability and polishability of the glass ceramics, the first grinding spindle made of glass ceramics having zero thermal expansion coefficient has been designed and manufactured. Depth of cut in grinding process is numerically controlled in the unit of 0.1 micron/pulse which is performed by the rigid spindles and bearings for a grinding wheel and table. Hydrostatic oil bearings are designed and manufactured having the features such as low thermal expansion, higher rigidity and higher revolutional accuracy. MnZn ferrite single crystal surfaces of 0.08micron in flatness and of 0.015 micron Rz in surface roughness were obtained by using this new grinder. By development of dressing and a grinding wheel, the smoother surface of less than 0.01 micron Rmax will be obtained by the machine.

零热膨胀的单晶和玻璃陶瓷预计将在不久的将来进行超级至关重要。这些材料由于其脆性机械性能而被拉开和抛光。这项研究旨在开发一种新的超精确垂直纺锤体研磨机，可以将陶瓷材料整理成具有尺寸准确性的亚微米的平面镜面。控制材料的热膨胀是最重要的，该材料是地面的材料，一种用于磨削过程中亚微米准确性的磨轮和机床。这项研究试图通过两种方法来减少这种热膨胀，即使用圆锥体扩展核心的玻璃陶瓷作为研磨轮轴的材料，并控制房间中的温度，磨水和静水压力油，使机床和工作场合均匀。由于脆性和加工成本昂贵，没有人会开发出玻璃陶瓷主轴。通过开发新的铸造和热处理过程，并检查了玻璃陶瓷的磨损性和可抛光性，已经设计和制造了具有零热膨胀系数的玻璃陶瓷制成的第一个研磨纺锤体。磨削过程切割的深度基本上是在0.1微米/脉冲的单位中控制的，该单位由刚性的纺锤体和轴承进行，用于磨轮和桌子。静水油轴承的设计和制造具有低热膨胀，较高的刚性和更高的革命精度等功能。通过使用这种新的磨床，获得了表面粗糙度的0.08micron和0.015微米RZ的MNZN铁氧体单晶表面。通过开发敷料和磨轮，机器将获得小于0.01微米rmax的光滑表面。