Ultra-Precision Machining and Surface Evaluation of Optical Flats for High Power Ultra-Violet Lasers

高功率紫外激光器光学平面的超精密加工和表面评估

基本信息

批准号：
02650104
负责人：
NAMBA Yoshiharu
金额：
$ 1.28万
依托单位：
Chubu University
依托单位国家：
日本
项目类别：
Grant-in-Aid for General Scientific Research (C)
财政年份：
1990
资助国家：
日本
起止时间：
1990 至无数据
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-02650104/
关键词：
Ultra-Precision Grinding Float Polishing Ultra-Violet Laser Laser Fusion Surface Roughness Scanning Tunneling Microscope Laser Damage Exima Laser

项目摘要

The final objects of this study is to develop the flat optical components having high accuracy, high transparency or reflectivity, higher laser damage threshold and higher responsibility for high power lasers of ultra-violet in wavelength, in order to help the development of high power examiner lasers and laser fusion program. This year's study was summarized as follows :1) Clean rooms keeping both constant temperature and humidity have been established for the ultra-precision machining and measuring. Anti-vibration foundations also have set up for ultra-precision instruments.2) A scanning tunneling microscope (STM) has been founded by a photographic instruments for a Nomarski interference microscope in order to show the correct place for measuring the micro-surface structure by STM. The STM has been calibrated by measuring the grating having 1000 grooves per mm. It has succeeded to measure Mn-Zn ferrite surfaces by STM without metal coating, though the measured material is not conductive.3) Various optical glasses have been ground into very smooth surfaces better than optically-polished ones by a ultra-precision surface grinder having a glass-ceramic spindle of zero-thermal expansion. Laser damage thresholds of ground laser glass surfaces have been measured. It is cleared that the damage threshold depends upon the surface roughness and contamination of ground surfaces. Ground surfaces show the higher damage thresholds rather than optically-polished surfaces.4) The float-polished laser glass shows the highest laser damage threshold of 30J/cm^2, which is double number rather than that of optically-polished surfaces.

这项研究的最终物体是开发具有高精度，高透明度或反射率，更高的激光损伤阈值以及对超紫罗莱仪高功率激光在波长中的高功率激光器的较高责任的平坦光学组件，以帮助发展高力量检查者激光和激光融合程序。今年的研究总结如下：1）为超精确的加工和测量确定了保持恒温和湿度的干净房间。抗振动基础也已为超精确仪器建立。2）扫描隧道显微镜（STM）是由nomarski干扰显微镜的摄影仪器建立的STM。通过测量每毫米1000个凹槽的光栅，已经校准了STM。它已经成功地通过无金属涂层的STM测量MN-ZN铁氧体表面，尽管测量材料不是导电的。3）各种光玻璃比具有超精确表面磨床的光学抛光更好地将其磨碎成非常光滑的表面零热膨胀的玻璃陶瓷主轴。测量了地面激光玻璃表面的激光损伤阈值。可以清楚地看出，损坏阈值取决于地面表面的表面粗糙度和污染。地面表面显示较高的损坏阈值，而不是光学上抛光的表面。4）浮子激光玻璃显示出最高的激光损伤阈值为30J/cm^2，这是双重数，而不是光涂上的表面。