Equipment: MRI: Track 2 Acquisition of the Thermo Fischer Cryogenic Helios 5 CX DualBeam for Materials Science

设备： MRI：Track 2 采购用于材料科学的 Thermo Fischer Cryogenic Helios 5 CX DualBeam

• 批准号: 2320409
• 负责人: Natalia Litchinitser
• 金额: $ 153.08万
• 依托单位: Duke University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2023
• 资助国家: 美国
• 起止时间: 2023-09-01 至 2026-08-31
• 项目状态: 未结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=2320409&HistoricalAwards=false
• 关键词: Equipment; MRI; Track; Acquisition; Thermo

The interdisciplinary field of modern materials science focuses on an increasingly smaller scale for understanding and manipulations of optical, mechanical, electrical, and thermal properties of materials, including naturally existing as well as with man-made, engineered materials. Remarkable progress in studying materials on the nanometer-scale is enabled by the advanced, state-of-the-art nanofabrication tools for carving bulk materials, creating and imaging nanoscale features. One of the most versatile nanofabrication and nano-imaging approaches relies on the focused ion beam (FIB) technique, widely used in the development of the latest generation of microelectronic systems, microfluidic chips, photonic and biomedical devices. Recently, the development of cryogenic FIB has further expanded its capabilities, particularly in characterizing materials and systems containing soft and liquid phases, while maintaining sample integrity. The Thermo Scientific™ Helios™ 5 CX DualBeam instrument offers a unique opportunity of handling samples at both room and cryogenic temperatures. Its cryogenic inert-gas sample transfer system enables the safe transfer of samples to gloveboxes and other instruments under cryogenic temperatures, without exposing them to ambient conditions. The instrument contributes to the educational mission of Shared Materials Instrumentation Facility at Duke and in the Research Triangle and Triad Areas enabling the diverse population of graduate, undergraduate, minority and female students to prepare nano- or microfluidic channels, deposition of nano-wires, and fabrication and characterization of micro-electro-mechanical systems. The Thermo Fischer Scientific Cryogenic Helios 5 CX DualBeam for Materials Science is an integrated FIB and scanning electron microscope instrument, enabling a plethora of flexibility to perform nanofabrication, lithography, volumetric imaging, and in-situ measurements. The development of more flexible ion beam columns and in-situ cooling capabilities in this instrument also reduce detrimental effects of Ga+ implantation and ion and electron beam irradiation-induced heating on the sample surface and enable studies of beam-sensitive, soft, and liquid materials. A cryogenic stage in a FIB is especially critical to scanning electron microscopy analysis and transmission electron microscopy specimen preparations for microelectronic, energy storage materials, and two-dimensional materials, which are extremely sensitive to ion and electron beams and can only be imaged and sectioned at cooled temperatures. The Thermo Fischer Scientific Cryogenic Helios 5 CX DualBeam enables a number of cutting-edge research projects including nanofabrication of hyperbolic metastructures for imaging with subwavelength resolution, characterization of hard-soft material interfaces where preparation of a very smooth surface exposing undamaged polymer with the hard domains is critical, studies of cathode-electrolyte interfaces in alkali-ion batteries, analysis of high-performance composites for lithium-metal batteries, investigation of interference effects in superconductor-quantum Hall hybrid structures, ultra-high-resolution imaging and characterization of the catalyst-support for plasmonic catalysts enabling solar ammonia synthesis under concentrated sunlight.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.

现代材料科学的跨学科领域侧重于在越来越小的范围内理解和操纵材料的光学、机械、电学和热性能，包括自然存在的材料以及人造、工程材料在研究材料方面取得的显着进展。纳米级是通过先进、最先进的纳米加工工具来雕刻块状材料、创建和成像纳米级特征最通用的纳米加工和纳米成像方法之一依赖于聚焦离子束（FIB）。技术广泛应用于最新一代微电子系统、微流控芯片、光子和生物医学设备的开发。最近，低温 FIB 的发展进一步扩展了其能力，特别是在表征包含软相和液相的材料和系统方面，同时保持了其性能。 Thermo Scientific™ Helios™ 5 CX DualBeam 仪器提供了在室温和低温下处理样品的独特机会，其低温惰性气体样品转移系统可将样品安全转移到手套箱和手套箱中。该仪器有助于杜克大学以及研究三角和三合会地区的共享材料仪器设施的教育使命，使研究生、本科生、少数族裔和女学生能够做好准备。用于材料科学的 Thermo Fischer Scientific Cryogenic Helios 5 CX DualBeam 是纳米或微流体通道、纳米线沉积以及微机电系统的制造和表征。集成的 FIB 和扫描电子显微镜仪器，能够非常灵活地执行纳米加工、光刻、体积成像和原位测量。该仪器中更灵活的离子束柱和原位冷却功能的开发也减少了不良影响。 Ga+ 注入以及离子和电子束辐照在样品表面引起的加热，并能够研究束敏感、软和液体材料。FIB 中的低温阶段对于扫描电子显微镜分析尤其重要。 Thermo Fischer Scientific Cryogenic Helios 5 CX DualBeam 可以用于微电子、储能材料和二维材料的透射电子显微镜样品制备，这些材料对离子束和电子束极其敏感，只能在冷却温度下成像和切片。许多尖端研究项目，包括用于亚波长分辨率成像的双曲超结构的纳米制造、软硬材料界面的表征，其中制备非常光滑的表面暴露具有硬域的未损坏聚合物至关重要，碱离子电池中阴极电解质界面的研究，锂金属电池高性能复合材料的分析，超导体-量子霍尔混合结构中的干扰效应研究，超高分辨率等离子体催化剂的催化剂载体的成像和表征，使太阳能氨合成能够在集中的阳光下进行。该奖项反映了 NSF 的法定使命，并通过使用基金会的智力评估进行评估，被认为值得支持优点和更广泛的影响审查标准。