Scalable Nanomanufacturing of Organic Electronics Using Laser Patterning in a Continuous Solvent Flow Liquid Cell

在连续溶剂流液体池中使用激光图案化进行有机电子产品的可扩展纳米制造

• 批准号: 2208009
• 负责人: Adam Moule
• 金额: $ 47.03万
• 依托单位: University of California-Davis
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2022
• 资助国家: 美国
• 起止时间: 2022-09-01 至 2025-08-31
• 项目状态: 未结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=2208009&HistoricalAwards=false
• 关键词: Scalable; Nanomanufacturing; Organic; Electronics; Using

This grant supports research that contributes to new knowledge in scalable nanomanufacturing processes, thereby promoting progress in science, technology, economic development, and human wellbeing. Photolithography is a manufacturing process that enables the patterning of electronic elements into small, controlled volumes to produce all modern integrated circuits, displays and computers. The aspect of photolithography that makes it so useful is that the size and shape of electronic components are controlled by focused light or laser patterning, which makes the technique fast, inexpensive, and reconfigurable for many applications. This award supports fundamental research to modify existing photolithography tools and methods and enables optical micropatterning of organic semiconducting polymers into electronic circuits. The new processing tool enables micro and nanopatterning, controlled doping and layering of a broad class of organic electronic materials that currently cannot be micro or nanopatterned into functional devices, such as, flexible electronics and wearables. Results from this research enables advancements in many applications such as chemical sensing, neuromorphic computing, and medical diagnostics. The ensuing technological impacts result in economic opportunities in healthcare, energy, and environment. This research lowers the cost for production of prototype organic electronic devices by orders of magnitude, which spurs economic growth and national prosperity. The project partners with instrument manufacturers, trains students at all levels and broadens participation of women and under-represented minorities.Photothermal patterning is a method that enables the optical writing of organic electronic materials (OEMs) into sub-micrometer domains, which is a critical processing step for fabrication of a wide variety of OEM devices. Photothermal patterning uses a focused laser to heat and dissolve portions of an OEM film that is in contact with a flowing solvent layer. The laser creates a negative resist pattern and the solvent flow removes dissolved material. Practical and technical barriers currently prevent the widespread use of photothermal patterning for OEMs. This project solves the practical problem by developing a unique design for an OEM micro and nanopatterning insert that is compatible with existing photolithography instruments. This allows researchers everywhere to use their existing cleanroom equipment to pattern this new class of materials. The main technical challenges are to understand and predict how processing conditions must be controlled to achieve high resolution patterning for different OEM materials. The research team develops a time-dependent continuum model that uses easily measurable experimental parameters to predict the shape, resolution, doping level and write-speed of real films under real conditions.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.

该赠款支持研究有助于扩展纳米制造过程的新知识的研究，从而促进了科学，技术，经济发展和人类福祉的进步。光刻是一个制造过程，可以使电子元素将电子元素模式化为小的，受控的量，以生成所有现代的集成电路，显示器和计算机。使其非常有用的光刻学的方面是，电子组件的大小和形状由聚焦的光或激光图案控制，这使得该技术可以快速，廉价，并且可用于许多应用。该奖项支持基础研究，以修改现有的光刻工具和方法，并将有机半导体聚合物的光学微图解在电子电路中。新的加工工具可实现微型和纳米图案，受控的掺杂和分层，这些有机电子材料当前无法微型或纳米图案中的功能设备，例如柔性电子设备和可穿戴设备。这项研究的结果可以在许多应用中取得进步，例如化学传感，神经形态计算和医学诊断。随后的技术影响导致医疗保健，能源和环境的经济机会。这项研究降低了原型有机电子设备的生产成本，从而刺激了经济增长和国家繁荣。项目合作伙伴与仪器制造商合作，在各个层面上培训学生，并扩大了女性和代表性不足的少数群体的参与。光疗图案是一种方法，可以使有机电子材料（OEMS）的光学写入子微米计域中，这是制造各种OEM设备的关键处理步骤。光热图案使用聚焦的激光加热和溶解与流动溶剂层接触的OEM膜的部分。激光产生负抗抗性模式，溶剂流量去除溶解的材料。目前，实用和技术障碍可以阻止对OEM的光热图案的广泛使用。该项目通过为与​​现有光刻仪器兼容的OEM微型和纳米图案插件开发独特的设计来解决实际问题。这使各地的研究人员能够使用他们现有的清洁室设备来对这种新的材料进行编制。主要的技术挑战是了解和预测必须如何控制处理条件以实现不同OEM材料的高分辨率模式。研究团队开发了一个与时间有关的连续模型，该模型使用易于测量的实验参数来预测在实际条件下真实电影的形状，分辨率，兴奋剂水平和写作速度。该奖项反映了NSF的法定任务，并被认为是值得通过基金会的知识绩效和更广泛影响的评估来通过评估来获得支持的。