SBIR Phase I: A Complementary Metal-Oxide Semiconductor (CMOS) Compatible Single Photon Avalanche Diode

SBIR 第一阶段：互补金属氧化物半导体 (CMOS) 兼容单光子雪崩二极管

• 批准号: 2136226
• 负责人: Ingvar Aberg
• 金额: $ 25.6万
• 依托单位: IMPACT PHOTONICS LLC
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2021
• 资助国家: 美国
• 起止时间: 2021-11-01 至 2022-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=2136226&HistoricalAwards=false
• 关键词: SBIR; Phase; Complementary; Metal; Oxide

The broader impact/commercial potential of this Small Business Innovation Research (SBIR) Phase I project is to make 3D cameras for long-range LiDAR (Light Detection and Ranging) more affordable, widespread, and as reliable and simple to use as cameras found in common mobile devices. 3D cameras (LiDAR) are being used for precise positioning and velocity determination of objects in augmented reality applications and are crucial for widespread adoption of autonomous cars and trucks where the 200-300 meter range is required. Eye safety concerns with low-cost silicon sensors force the long-range autonomous vehicle customers to use one pixel at the time or limited field of view imaging using high-cost and complex systems based on materials that require specialty materials and manufacturing. This technology will enable the use of mainstream materials and process technology for the long-range autonomous vehicle segment without compromising eye safety. This capability will reduce cost, lower complexity, and improve reliability of long-range 3D cameras and help propel the autonomous vehicle industry into widespread adoption.This Small Business Innovation Research (SBIR) Phase I project aims to develop a fully complementary metal-oxide semiconductor compatible single photon avalanche diode (SPADs) based on germanium that operates at eye safe wavelengths. Current germanium-based avalanche photodiodes require cryogenic cooling due to excessive dark noise from tunneling or dislocations. They suffer from poor absorption at the eye safe wavelengths beyond 1450 nm. This project will implement a photon trapping strained heterostructure device architecture which reduces dark counts while enhancing absorption at the operating wavelength. The device structure will be developed with particular emphasis on the semiconductor growth process. The experimental results will be benchmarked to the dark count and absorption requirements for the mass-market, long-range autonomous vehicle application. The technology will offer a highly manufacturable, lower cost alternative to compound semiconductor based SPADs that are often prohibitively expensive to produce in large arrays.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.

该小型企业创新研究 (SBIR) 第一阶段项目的更广泛影响/商业潜力是使用于远程 LiDAR（光探测和测距）的 3D 相机更加经济实惠、广泛使用，并且与 3D 相机一样可靠且易于使用。常见的移动设备。 3D 相机 (LiDAR) 用于增强现实应用中物体的精确定位和速度测定，对于需要 200-300 米范围的自动驾驶汽车和卡车的广泛采用至关重要。对低成本硅传感器的眼睛安全问题迫使远程自动驾驶汽车客户一次使用一个像素或使用基于需要特殊材料和制造的材料的高成本和复杂系统的有限视场成像。该技术将使远程自动驾驶汽车领域能够使用主流材料和工艺技术，而不会影响眼睛安全。此功能将降低成本、降低复杂性并提高远程 3D 摄像头的可靠性，并有助于推动自动驾驶汽车行业的广泛采用。该小型企业创新研究 (SBIR) 第一阶段项目旨在开发完全互补的金属氧化物半导体基于锗的兼容单光子雪崩二极管 (SPAD)，在人眼安全波长下工作。由于隧道或位错产生过多的暗噪声，当前的基于锗的雪崩光电二极管需要低温冷却。 它们对超过 1450 nm 的眼睛安全波长的吸收较差。该项目将实施光子捕获应变异质结构器件架构，该架构可减少暗计数，同时增强工作波长的吸收。器件结构的开发将特别注重半导体生长工艺。实验结果将以大众市场远程自动驾驶汽车应用的暗计数和吸收要求为基准。该技术将为基于化合物半导体的 SPAD 提供一种高度可制造、成本更低的替代方案，而后者在大型阵列中的生产成本通常过高。该奖项反映了 NSF 的法定使命，并通过使用基金会的智力优势和更广泛的影响进行评估，被认为值得支持。审查标准。