Collaborative Research: Highly Ordered Nanoscale Patterns Produced by Ion Bombardment of Solid Surfaces: Theory and Experiment

合作研究：离子轰击固体表面产生的高度有序的纳米级图案：理论与实验

• 批准号: 2116753
• 负责人: Richard Bradley
• 金额: $ 27.5万
• 依托单位: Colorado State University
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 2022
• 资助国家: 美国
• 起止时间: 2022-01-01 至 2024-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=2116753&HistoricalAwards=false
• 关键词: Collaborative; Research; Highly; Ordered; Nanoscale

When a flat solid surface is bombarded with a broad ion beam, patterns can emerge spontaneously, including surface ripples with a wavelength as short as one ten-thousandth of the width of a human hair. If the patterns formed were not almost always disordered, this fascinating type of self-organization could become a widely employed method of fabricating structures with feature sizes too small to be produced by conventional techniques. A central goal of this collaborative theoretical and experimental research is therefore to develop and refine methods of producing highly ordered surface ripples by ion bombardment. Surfaces patterns of this kind could be used in a variety of applications, including ones in which extreme ultraviolet light must be manipulated or analyzed. This project involves graduate, undergraduate and high school students who are working in a field that bridges basic research and applications. In addition to experiencing, and contributing to, an important topic in current materials research, the students are learning to use a wide range of theoretical, simulation and materials characterization tools that will translate well to future careers in industry or academia. Beyond working with the materials research communities at their home institutions, the project is providing the students with a broader perspective through participation in the exciting, multi-disciplinary environments at national x-ray scattering facilities.This collaboration brings together two principal investigators who have individually made seminal theoretical and experimental contributions to the field of ion beam nanopatterning, producing a team that is uniquely positioned to advance the field. Two key strategies are being employed in working toward the goal of producing surface ripples with an exceptional degree of order. These strategies are also leading to important steps forward in our understanding of the fundamental processes that take place during ion bombardment. The first strategy is to study the onset of pattern formation that occurs as the angle of ion incidence or the sample temperature is varied through a threshold value. Near-threshold behavior is being examined in three different regimes: 1) the higher energy regime in which sputtering is important; 2) the low-energy regime in which sputtering is negligible, a largely unexplored frontier of the field; and 3) the high-temperature regime in which the surface remains crystalline, resulting in better quality material for electronic/photonic applications. The equation of motion becomes simpler near these transitions and can be rigorously derived. In addition, it has a high degree of universality, i.e., it is to a large extent independent of the choice of target material and ion species. Studying near-threshold behavior was the key to making fundamental advances in the theory of phase transitions, and the same is proving to be true for ion-induced pattern formation. Finally, and most importantly, almost perfectly ordered ripple patterns are in certain circumstances predicted to form close to threshold. The second central strategy of the project is to exploit the power of real-time x-ray scattering. The extreme sensitivity of grazing-incidence small-angle x-ray scattering to surface disturbances makes it an ideal method to study the near-threshold behavior of the nanopatterns and to rigorously test the theory. Moreover, the research team is taking advantage of the increasing coherent x-ray flux available at new and upgraded synchrotron sources to develop coherent x-ray scattering as a powerful new approach to investigating surface dynamics at the nanoscale. Coherent scattering gives entirely new insight, going beyond study of the average surface evolution to measure the time-dependent fluctuations of the microstructure around the average kinetics, enabling novel tests of the detailed theoretical predictions.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.

当平坦的固体表面受到宽离子束轰击时，图案可以自发地出现，包括波长短至人类头发宽度的万分之一的表面波纹。如果形成的图案并不总是无序的，那么这种令人着迷的自组织类型可能会成为一种广泛采用的制造特征尺寸太小而无法通过传统技术生产的结构的方法。因此，这项合作理论和实验研究的中心目标是开发和完善通过离子轰击产生高度有序表面波纹的方法。这种表面图案可用于多种应用，包括必须操纵或分析极紫外光的应用。该项目涉及在基础研究和应用之间架起桥梁的领域工作的研究生、本科生和高中生。除了体验当前材料研究的一个重要主题并为其做出贡献之外，学生们还学习使用各种理论、模拟和材料表征工具，这些工具将很好地转化为未来在工业界或学术界的职业生涯。除了与所在机构的材料研究团体合作外，该项目还通过参与国家 X 射线散射设施令人兴奋的多学科环境，为学生提供更广阔的视野。这项合作汇集了两位主要研究人员，他们分别拥有在离子束纳米图案领域做出了开创性的理论和实验贡献，组建了一支在推进该领域具有独特地位的团队。为了实现产生具有特殊有序度的表面波纹的目标，正在采用两种关键策略。这些策略也使我们在理解离子轰击过程中发生的基本过程方面向前迈出了重要的一步。第一个策略是研究当离子入射角或样品温度通过阈值变化时发生的图案形成的开始。近阈值行为正在三种不同的状态下进行检查：1）较高能量状态，其中溅射很重要； 2）溅射可以忽略不计的低能状态，这是该领域很大程度上尚未探索的前沿； 3) 表面保持结晶状态的高温状态，从而为电子/光子应用提供质量更好的材料。在这些转变附近，运动方程变得更简单，并且可以严格推导。此外，它具有高度的通用性，即它在很大程度上独立于目标材料和离子种类的选择。研究近阈值行为是相变理论取得根本性进展的关键，离子诱导图案形成也是如此。最后，也是最重要的是，在某些情况下，预计几乎完美有序的波纹图案将形成接近阈值。该项目的第二个核心策略是利用实时 X 射线散射的力量。掠入射小角度 X 射线散射对表面扰动的极端敏感性使其成为研究纳米图案的近阈值行为并严格测试该理论的理想方法。此外，研究小组正在利用新的和升级的同步加速器源中不断增加的相干 X 射线通量来开发相干 X 射线散射，作为研究纳米尺度表面动力学的强大新方法。相干散射提供了全新的见解，超越了平均表面演化的研究，测量了平均动力学周围微观结构随时间的波动，从而能够对详细的理论预测进行新颖的测试。该奖项反映了 NSF 的法定使命，并被认为是值得的通过使用基金会的智力优势和更广泛的影响审查标准进行评估来获得支持。

项目成果

Spatially extended dislocations produced by the dispersive Swift-Hohenberg equation

由色散 Swift-Hohenberg 方程产生的空间扩展位错

• DOI: 10.1103/physreve.107.044214
• 发表时间: 2023
• 期刊: Physical Review E
• 影响因子: 2.4
• 作者: Balch, Brenden;Shipman, Patrick D.;Bradley, R. Mark
• 通讯作者: Bradley, R. Mark

Sputter yields of surfaces with nanoscale textures: Analytical results and Monte Carlo simulations

具有纳米级纹理的表面的溅射产率：分析结果和蒙特卡罗模拟

• DOI: 10.1063/5.0137324
• 发表时间: 2023
• 期刊: Journal of Applied Physics
• 影响因子: 3.2
• 作者: Bradley, R. Mark;Hobler, Gerhard
• 通讯作者: Hobler, Gerhard

Nanoscale pattern formation produced by ion bombardment of a rotating target: The decisive role of the ion energy

• DOI: 10.1103/physreve.107.014801
• 发表时间: 2023-01-17
• 期刊: PHYSICAL REVIEW E
• 影响因子: 2.4
• 作者: Bradley, R. Mark;Pearson, Daniel A.
• 通讯作者: Pearson, Daniel A.

Nanoscale pattern formation on silicon surfaces bombarded with a krypton ion beam: experiments and simulations

用氪离子束轰击硅表面形成纳米级图案：实验和模拟

• 发表时间: 2022
• 期刊: Journal of physics
• 作者: Seo, J.;Pearson, D. A.;Bradley, R. M.;Kim, J.-S.
• 通讯作者: Kim, J.-S.