I-Corps: A Technology for Complementary Metal-Oxide Semiconductors (CMOS)-Integrated Vapor Sensors

I-Corps：互补金属氧化物半导体 (CMOS) 集成蒸汽传感器技术

• 批准号: 2011426
• 负责人: Ioannis Kymissis
• 金额: $ 5万
• 依托单位: Columbia University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2020
• 资助国家: 美国
• 起止时间: 2020-02-15 至 2021-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=2011426&HistoricalAwards=false
• 关键词: Corps; Technology; Complementary; Metal; Oxide

The broader impact/commercial potential of this I-Corps project will be the development and commercialization of a new highly sensitive technology for vapor sensing. This technology offers several advantages, including low power draw and high sensitivity, which allows for its integration in a range of persistent, wireless, portable, and autonomous monitoring applications. These vapor sensors are anticipated to have application to a wide range of fields including agriculture, threat detection, health, indoor air quality, analysis of pollutants, and industrial chemical safety. The developed technology is further expected to impact a range of fields leading to significant improvements in the quality of agricultural products, public health and safety, the efficiency of indoor climate control, and a broad range of medical technologies. This I-Corps project is based on the development of a high sensitivity, microfabricated mass sensor functionalized with advanced sensor materialsto create low-cost, low-power vapor sensing system. The proposed architecture fabricates a high frequency bulk acoustic resonator directly on the back-end of a Complementary Metal-Oxide Semiconductors (CMOS)-Integrated Chip (IC), which further improves the noise characteristics of thesensor. The direct integration approach proposed simplifies the architecture for bulk acoustic wave vapor sensors, allows for less noise, and reduces the parasitics present in the structure. The direct co-integration also allows for the fabrication of an array of mass sensors that permits the creation of an electronic nose, in which the response to multiple receptors can be used to classify vapor materials and reduce the effect of nonspecific responses. The silicon IC also may compensate for thermal drift, further improving the noise floor.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.

该I-Corps项目的更广泛的影响/商业潜力将是一种新的高度敏感技术来开发和商业化用于蒸气感。 该技术提供了几个优势，包括低功率抽签和高灵敏度，可以将其集成到一系列持久，无线，便携式和自主监控应用中。 预计这些蒸气传感器将应用于各种领域，包括农业，威胁检测，健康，室内空气质量，污染物分析和工业化学安全。 预计开发的技术将影响一系列领域，从而导致农产品质量，公共卫生和安全性，室内气候控制效率以及广泛的医疗技术的显着提高。 该I-Corps项目基于高灵敏度，微生物质量传感器的发展，该质量传感器用高级传感器材料功能化，以创建低成本的低功率蒸气传感系统。所提出的结构直接在互补的金属氧化物半导体（CMOS）集成芯片（IC）的后端上构建了高频散装声音谐振器，从而进一步改善了该ensensor的噪声特征。 提出的直接集成方法简化了散装声波蒸气传感器的体系结构，可以减少噪声，并减少结构中存在的寄生虫。直接的协整还允许制造一系列质量传感器，该质量传感器允许产生电子鼻子，其中可以使用对多个受体的响应来对蒸气材料进行分类并减少非特异性响应的效果。硅IC还可以弥补热漂移，进一步改善噪声局。该奖项反映了NSF的法定任务，并且使用基金会的知识分子优点和更广泛的影响审查标准，被认为值得通过评估来获得支持。