Collaborative Research: Transfer Printed, Single-Crystalline Si Nanomesh Thin Films

合作研究：转移印刷单晶硅纳米网薄膜

• 批准号: 1905575
• 负责人: Hui Fang
• 金额: $ 27.12万
• 依托单位: Northeastern University
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 2019
• 资助国家: 美国
• 起止时间: 2019-07-01 至 2021-09-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1905575&HistoricalAwards=false
• 关键词: Collaborative; Research; Transfer; Printed; Single

Non-technical description: Stretchable electronics have emerged as promising platforms for many important areas such as bio-mimetics, health monitoring, biomedical therapeutics, and soft robotics. This project investigates a set of foundational materials science problems to, for the first time, establish a new electronic materials platform - Si nanomeshes - for next-generation stretchable electronics. The transformative aspect of this project arises from the broad utility of the resulting design and engineering knowledge for nanomesh electronic materials, having profound impacts to not only fundamental materials science but also a broad range of applications in human-electronic interfaces and smart robots. The collaborative team also utilizes this project to integrate creative educational activities with cutting-edge research at multiple levels through: (1) engaging K-12 students via summer research and exhibiting at Oklahoma WONDERtorium Children's museum; (2) actively attracting undergraduate students for early research; and (3) the continuous curriculum development at both Northeastern University and Oklahoma State University to expand capacity in the soft electronic materials field. Technical description: Stretchable electronics research has long been facing the dichotomy between device performance and density. In the past decade, there has been significant progress in realizing stretchable semiconductors, however, existing approaches are still incomplete when high-density, high-performance stretchable electronics are needed. On the basis of strong preliminary results from the research team, the principal investigators hypothesize that with tailored nanomesh geometries and engineered sidewall surface states, Si nanomeshes can achieve simultaneously large stretchability, high mobility and high reliability that are needed for high-density stretchable electronics. Through both theoretical and experimental investigations, this project aims to investigate and establish the interrelationship of structure-processing-properties of Si nanomeshes for stretchable devices. Key structure variables to investigate include in-plane nanomesh pattern, out-of-plane materials stacking and sidewall surface states, while main properties targeted are mechanical flexibility, stretchability, and carrier transport mobilities. The project then achieves Si nanomeshes with desired mesh patterns through viable top-down approaches, prints and fabricates sidewall engineered Si-nanomesh based stretchable devices. A set of combined optical and electrical characterizations systematically investigate the properties of sidewall-engineered Si nanomeshes under stretching and scaling. Besides potential applications for high-performance stretchable electronics, this semiconductor nanomesh concept provides a new platform for materials engineering, and is expected to yield a new family of stretchable materials having tunable electronic and optoelectronic properties with customized nanostructures.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.

非技术描述：可拉伸电子产品已成为许多重要领域（例如仿生学、健康监测、生物医学治疗和软机器人）的有前途的平台。该项目研究了一系列基础材料科学问题，首次为下一代可拉伸电子产品建立了一个新的电子材料平台——硅纳米网。该项目的变革性方面源于纳米网电子材料的设计和工程知识的广泛应用，不仅对基础材料科学产生深远影响，而且对人机界面和智能机器人的广泛应用产生深远影响。合作团队还利用该项目，通过以下方式将创意教育活动与多个层面的前沿研究相结合：（1）通过暑期研究和在俄克拉荷马州 WONDERtorium 儿童博物馆的展览吸引 K-12 学生； （2）积极吸引本科生进行早期研究； (3)东北大学和俄克拉荷马州立大学不断开发课程，扩大软电子材料领域的能力。技术描述：可拉伸电子学研究长期以来一直面临着器件性能和密度之间的二分法。在过去的十年中，在实现可拉伸半导体方面取得了重大进展，然而，当需要高密度、高性能可拉伸电子器件时，现有方法仍然不完善。基于研究团队强有力的初步结果，主要研究人员假设，通过定制的纳米网格几何形状和工程侧壁表面状态，硅纳米网格可以同时实现高密度可拉伸电子产品所需的大拉伸性、高迁移率和高可靠性。通过理论和实验研究，该项目旨在研究和建立可拉伸器件的硅纳米网结构-加工-性能之间的相互关系。要研究的关键结构变量包括面内纳米网格图案、面外材料堆叠和侧壁表面状态，而主要目标特性是机械灵活性、拉伸性和载流子传输迁移率。然后，该项目通过可行的自上而下的方法实现具有所需网格图案的硅纳米网，打印并制造基于侧壁工程硅纳米网的可拉伸装置。一组组合的光学和电学表征系统地研究了侧壁工程硅纳米网在拉伸和缩放下的性能。除了高性能可拉伸电子产品的潜在应用之外，这种半导体纳米网概念还为材料工程提供了一个新平台，并有望产生一系列新的可拉伸材料，这些材料具有可调节的电子和光电特性以及定制的纳米结构。该奖项反映了 NSF 的法定使命和通过使用基金会的智力优点和更广泛的影响审查标准进行评估，该项目被认为值得支持。

项目成果

Nanomeshed Si nanomembranes

• DOI: 10.1038/s41528-019-0053-5
• 发表时间: 2019-05
• 期刊: npj Flexible Electronics
• 影响因子: 14.6
• 作者: Xun Han;Kyung Jin Seo;Yi Qiang;Zeping Li;S. Vinnikova;Yiding Zhong;Xuanyi Zhao;Peijie Hao;Shuodao Wang;Hui Fang

Mechanics of Regular-Shape Nanomeshes for Transparent and Stretchable Devices

• DOI: 10.1115/1.4047777
• 发表时间: 2020-10
• 期刊: Journal of Applied Mechanics
• 作者: S. Vinnikova;H. Fang;Shuodao Wang