OP: MEMS-driven photonic metamaterials: dynamic wavefront tailoring with reconfigurable metasurfaces

OP：MEMS 驱动的光子超材料：具有可重构超表面的动态波前定制

• 批准号: 1810252
• 负责人: Xin Zhang
• 金额: $ 36.21万
• 依托单位: Trustees of Boston University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2018
• 资助国家: 美国
• 起止时间: 2018-09-01 至 2024-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1810252&HistoricalAwards=false
• 关键词: OP; MEMS; driven; photonic; metamaterials

Part A:This project aims to develop tunable metamaterials driven by integrated microelectromechanical system (MEMS) actuators for dynamic control of terahertz and infrared light. Photonic metamaterials have proven to be a powerful tool to manipulate light propagation. However, there is an existing challenge concerning the development of random access metamaterials with on-demand effective properties. In order to overcome this grand challenge, MEMS actuators will be integrated with metamaterial unit cells, enabling on-demand light manipulation. The physics of phase control, design of unit cells, micro-/nanofabrication, and system integration schemes will be investigated to realize metamaterial devices that can manipulate the wavefront of terahertz and infrared light as desired, enabling, for example, dynamic beam steering and tunable focusing. The metamaterial devices that will be developed are multifunctional, compact, and dynamically tunable, offering significant potential in comparison to conventional optical devices. The success of this project will boost the development of opto-electronic systems in areas such as spectroscopy, high-resolution imaging, and light detection and ranging (LiDAR), which are widely used in healthcare and national security and defense. This project provides a platform to educate young researchers, including women and underrepresented minorities, fostering their passion in fundamental optics and photonics research and applied engineering technologies.Part B:Metamaterials have revolutionized electromagnetism during the past decade resulting in myriad new phenomena including cloaking, negative refractive index, and tunable electromagnetic composites. The goal of this project is to develop dynamically reconfigurable metamaterials to manipulate the wavefront of terahertz and infrared light, which is enabled by integrating MEMS actuators in metamaterial unit cells. For efficient wavefront manipulation, the key is to achieve full-span phase coverage with constant amplitude in the response of metamaterial unit cells. However, the amplitude and phase response of the majority of metamaterial designs are bounded, making it challenging to achieve high-efficiency wavefront manipulation. In the proposed work, the coupling effect between the metamaterial layer and a ground plane or two layers of metamaterials will be studied to design structures that can modulate the phase response with little effect on the amplitude response, i.e. decoupling amplitude and phase modulation. Fabrication processes will be developed to construct metamaterial devices based on both surface and bulk micro-/nanomachining techniques. The integration of metamaterial unit cells and MEMS actuators will be investigated and optimized to make each unit cell accessible individually by employing advanced MEMS integration and packaging techniques including three-dimensional wire routing, through silicon vias (TSVs) and flip chip bonding. Finally, tunable metamaterial devices exhibiting multifunctionality will be demonstrated to manipulate terahertz and infrared light. This includes dynamic beam steering and focusing, which cannot be achieved with state-of-the-art techniques, for a variety of applications, such as spectroscopy, imaging, and LiDAR.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.

A部分：该项目旨在开发由集成的微电动系统（MEMS）执行器驱动的可调超材料，以动态控制Terahertz和红外光。光子上材料已被证明是操纵光传播的强大工具。但是，关于具有按需有效属性的随机访问超材料的发展存在挑战。为了克服这一巨大的挑战，MEMS致动器将与超材料单位细胞集成，从而实现按需光操纵。将研究相位控制，单位电池的设计，微/纳米化和系统集成方案的物理学，以实现可以操纵Terahertz和红外光线的超材料设备，例如所需的光线，例如，使动态束转向和动态束转向和动态光束转向和调谐专注。将要开发的超材料设备是多功能，紧凑且动态调谐的，与常规光学设备相比，具有巨大的潜力。该项目的成功将促进光谱，高分辨率成像以及光检测和范围（LIDAR）等领域的光电系统的开发，这些系统广泛用于医疗保健，国家安全和国防。该项目为教育年轻研究人员提供了一个平台，包括妇女和代表性不足的少数群体，促进了她们对基本光学和光子学研究和应用工程技术的热情。第B：寄托型在过去的十次中彻底改变了电磁革命，导致了许多新现象，包括Clocaking，包括Clocaking，包括Clocakic，折射率和可调电磁复合材料。该项目的目的是开发动态的可重新配置的超材料来操纵Terahertz和红外光的波前，这是通过在超材料单位细胞中集成MEMS执行器来实现的。为了有效的波前操纵，关键是要在超材料单位细胞的响应中实现全对于个晶状体覆盖范围。但是，大多数超材料设计的幅度和相位响应是有限的，这使得实现高效率波前操纵的挑战。在拟议的工作中，将研究超材料层和一层或两层超材料之间的耦合效应，以设计可以调节相位响应的结构，而对幅度响应几乎没有影响，即脱钩幅度和相位调节。制造工艺将开发以基于表面和散装微/纳米机械技术构建超材料设备。将研究并优化超材料单位单元和MEMS致动器的集成，以使每个单位电池通过采用先进的MEMS集成和包装技术，包括三维线路路由，通过硅VIA（TSV）（TSV）和翻转芯片键合。最后，将证明具有多功能性的可调超材料设备可以操纵Terahertz和红外光线。这包括动态束转向和聚焦，这是针对各种应用，例如光谱，成像和激光措施，无法实现的。这奖反映了NSF的法定任务，并被认为值得支持。通过使用基金会的智力优点和更广泛影响的评论标准进行评估。

项目成果

Tunable Toroidal Response in a Reconfigurable Terahertz Metamaterial

• DOI: 10.1002/adom.202101215
• 发表时间: 2021-09
• 期刊: Advanced Optical Materials
• 影响因子: 9
• 作者: Chunxu Chen;Kelson J. Kaj;Yuwei Huang;Xiaoguang Zhao;R. Averitt;Xin Zhang

Integrating microsystems with metamaterials towards metadevices

将微系统与超材料集成到元设备

• DOI: 10.1038/s41378-018-0042-1
• 发表时间: 2019
• 期刊: Microsystems & Nanoengineering
• 影响因子: 7.9
• 作者: Zhao, Xiaoguang;Duan, Guangwu;Li, Aobo;Chen, Chunxu;Zhang, Xin
• 通讯作者: Zhang, Xin

Electromechanically tunable metasurface transmission waveplate at terahertz frequencies

• DOI: 10.1364/optica.5.000303
• 发表时间: 2018-03-20
• 期刊: OPTICA
• 影响因子: 10.4
• 作者: Zhao, Xiaoguang;Schalch, Jacob;Zhang, Xin
• 通讯作者: Zhang, Xin

A survey of theoretical models for terahertz electromagnetic metamaterial absorbers

• DOI: 10.1016/j.sna.2018.12.039
• 发表时间: 2019-03-01
• 期刊: SENSORS AND ACTUATORS A-PHYSICAL
• 影响因子: 4.6
• 作者: Duan, Guangwu;Schalch, Jacob;Zhang, Xin
• 通讯作者: Zhang, Xin

Real-time tunable phase response and group delay in broadside coupled split-ring resonators

• DOI: 10.1103/physrevb.99.245111
• 发表时间: 2019-06
• 期刊: Physical Review B
• 影响因子: 3.7
• 作者: Xiaoguang Zhao;Jingdi Zhang;K. Fan;G. Duan;J. Schalch;G. Keiser;R. Averitt;Xin Zhang