EAGER: Monolithic Phononic Crystals and Programmable Surface Acoustic Wave Microfluidics

EAGER：单片声子晶体和可编程表面声波微流体

• 批准号: 1642502
• 负责人: Ahmet Yanik
• 金额: $ 8.5万
• 依托单位: University of California-Santa Cruz
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2016
• 资助国家: 美国
• 起止时间: 2016-07-01 至 2017-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1642502&HistoricalAwards=false
• 关键词: EAGER; Monolithic; Phononic; Crystals; Programmable

The last few decades, a number of major technological breakthroughs are mainly enabled by our ability to control two elementary particles: electrons and photons. Phonon is another important elementary particle that is responsible from heat and sound transfer. However, there are only limited studies focused on exploiting phonons for our needs. Harvesting phonons, specifically surface acoustic waves, could lead to new practical microfluidic devices with novel properties. Acoustic phonons can exert strong radiation forces to bioparticles (viruses, bacteria and cell) and manipulate them with high precision and efficiency. This proposal offers using phononic crystals to achieve this. Incorporation of such phononic crystals with microfluidics provides an unprecedented level of control on surface acoustic waves in microfluidic system. This capability can potentially lead to monolithic, ultra-compact, versatile and programmable microfluidic devices. Fusing of phononics and microfluidics could open door to a new world of lab-on-chip biomedical technologies and impact everyday life in previously unthinkable ways, in a similar fashion to how electrons and photons did so far. The educational component of this program is expected to provide UCSC undergraduate and graduate students with interdisciplinary training in physics, electrical engineering and biological sciences. Outcomes of the research will be integrated in a graduate student curriculum and results will be disseminated to broader audience by presentations to middle school Girls through 'Girls in Engineering Program' and to underrepresented minorities through 'Multicultural Engineering Program' The objective of this research proposal is to explore the feasibility of developing microfluidic devices with new functionalities using phononic crystals on silicon substrates. Phononic crystals offer potentially unlimited ways of tailoring acoustic waves. However, to date, they have not been used in acousto-microfluidic applications, other than few simple applications related to mixing and guiding of microdroplets resting on a solid substrate in open air. Full integration of continuous flow microfluidics and phononic crystals has yet to be demonstrated. This project aims to demonstrate practical, facile utilization of phononic crystals in acoustofluidics by making use of the concepts such as band gap formation and evanescent modes of defect states. In this one-year proposal, two basic design concepts will be explored: (i) phononic crystal reflectors, and (ii) phononic crystal waveguide structures. These two structures offer a complete set of basic building blocks to achieve more complex phononic crystal microfluidics with enhanced capabilities (see motivation section below). This one-year project has four specific goals: (1)To design phononic crystal devices with theoretical modeling and finite element simulations. (2)To fabricate of phononic crystal devices and integrate them with interdigital transducers on a silicon substrate. (3)To characterize surface acoustic wave behavior of the integrated structures. (4)To integrate microfluidics with phononic crystals and interdigital transducers to achieve size based micro-particle separation and micro-particle guiding. The proposed research program involves numerical design of monolithic acoustofluidic systems in which particle manipulation is taken care of by phononic crystals through techniques, such as finite-element method. The devices are fabricated using well-established microfabrication techniques such as photolithography, metal deposition, soft lithography and deep reactive ion etching. In this proposal, microfuidic testing will be limited to fluorescent silica particles for rapid device development purposes.

在过去的几十年中，许多主要的技术突破主要是由于我们控制两个基本粒子的能力：电子和光子。声子是另一个重要的基本粒子，是由热量和声音传递负责的。但是，只有有限的研究重点是为我们的需求利用声子。收获声子，特别是表面声波，可能导致具有新型特性的新实用微流体设备。声音子可以向生物颗粒（病毒，细菌和细胞）发挥强烈的辐射力，并以高精度和效率来操纵它们。该提案提供了使用Phononic Crystals实现这一目标的建议。将这种语音晶体与微流体融合在一起为微流体系统中的表面声波提供了前所未有的控制水平。这种能力可能会导致整体，超紧凑，多功能和可编程的微流体设备。语音和微流体的融合可以打开一个新的片上实验室生物医学技术的世界，并以以前无法想象的方式影响日常生活，其方式与到目前为止电子和光子的表现类似。该计划的教育部分有望为UCSC的本科生和研究生提供物理，电气工程和生物科学的跨学科培训。这项研究的结果将整合到研究生课程中，结果将通过“工程女生”中的中学女孩的介绍将更广泛的受众传播到更广泛的受众群体中，并通过“多元文化工程计划”的目的来探索与新功能相关的siliconic siliconics silicnic consic silic contrications探索该研究建议的目标。音调晶体提供了定制声波的潜在无限方法。但是，迄今为止，除了与露天基板上的微颗粒混合和指导相关的少数简单应用中，它们尚未用于大量微流体应用。连续流微流体和语音晶体的完整整合尚待证明。该项目旨在通过利用诸如带隙形成和缺陷状态的逃生模式来证明对Acoustofluidics中语音晶体的实用，便捷的利用。在这个为期一年的建议中，将探讨两个基本的设计概念：（i）音调晶体反射器和（ii）Phononic Crystal波导结构。这两个结构提供了一组完整的基本构建块，以实现具有增强功能的更复杂的语音晶体微流体（请参见下面的动机部分）。这个为期一年的项目有四个特定的目标：（1）使用理论建模和有限元模拟设计语音晶体设备。 （2）制造语音晶体设备，并将它们与硅基板上的跨换能器集成在一起。 （3）表征集成结构的表面声波行为。 （4）将微流体与音调晶体和跨胶水换能器整合在一起，以实现基于尺寸的微颗粒分离和微颗粒引导。拟议的研究计划涉及整体式浮力系统的数值设计，其中通过技术（例如有限元方法）通过语音晶体来照顾粒子操纵。这些设备是使用良好的微型化技术制造的，例如光刻，金属沉积，柔软的光刻和深反应性离子蚀刻。在此提案中，用于快速设备开发目的的荧光二氧化硅颗粒将仅限于荧光二氧化硅颗粒。