SNM: Scalable Nanomanufacturing of 2D Electronic Materials and Devices Using Automated Exfoliation

SNM：使用自动剥离的二维电子材料和设备的可扩展纳米制造

• 批准号: 1636256
• 负责人: Daryl Chrzan
• 金额: $ 125万
• 依托单位: University of California-Berkeley
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2016
• 资助国家: 美国
• 起止时间: 2016-09-01 至 2021-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1636256&HistoricalAwards=false
• 关键词: SNM; Scalable; Nanomanufacturing; 2D; Electronic

The investigation of the properties of two-dimensional (2D) materials - materials that are one atomic layer thick - has revealed truly remarkable behavior that, in principle, enable the development of the next generation of electronic and optical devices. For example, the flexibility, strength and opto-electronic properties of some 2D materials make them ideal candidates for applications in flexible electronics (e.g. displays). However, the technological impact of these materials has not been fully realized because these devices cannot be manufactured at scale. Moreover, the steps used to create 2D electronic materials-based devices in the laboratory are inefficient and unreliable, and result in a very low yield of working devices. This Scalable NanoManufacturing (SNM) award is aimed at developing an economical, scalable, high-yield approach to the production of opto-electronic devices based on 2D electronic materials. This highly interdisciplinary research relies on several science and engineering disciplines including nanomanufacturing, electrical engineering, materials science and computation to develop and optimize the manufacturing process. The research will immerse a number of young scholars diverse in both background and experience within a highly collaborative and interdisciplinary research environment.The laboratory process for creating devices from 2D electronic materials employs "sticky tape" as a means for exfoliating single layered samples from bulk crystals and transferring them to other substrates. Typically, the first exfoliated layer consists of multiple 2D layers of the desired material requiring repeated sticky tape exfoliation to produce a single monolayer of the material. This painstaking process is not scalable and often yields a sample too small to enable the manufacturing of devices. Recently, the research team has discovered that thin metallic films covalently or semi-covalently bonded to the surface layer of a crystal can be used as an improved sticky tape. The properties of the thin films enable isolation of monolayer samples up to 0.5 mm in lateral dimensions during the first exfoliation step. This discovery opens the door to development of a scalable nanomanufacturing approach to the fabrication of devices built from 2D electronic materials. Using a combination of theory and experiment, this award will determine the choice of metal films for exfoliation of prototypical 2D materials. Using these films, the project will develop a highly multiplexed elastomer stamping approach to automate the exfoliation process and to demonstrate the scalable fabrication of 2D electronic materials-based devices for applications ranging from opto-electronic devices to chemical sensors, and as compliant substrates for the epitaxial growth of other materials.

对二维 (2D) 材料（一层原子层厚的材料）特性的研究揭示了真正非凡的行为，原则上可以实现下一代电子和光学设备的开发。例如，某些二维材料的灵活性、强度和光电特性使其成为柔性电子产品（例如显示器）应用的理想选择。然而，这些材料的技术影响尚未完全实现，因为这些设备无法大规模制造。 此外，在实验室中创建基于二维电子材料的器件的步骤效率低下且不可靠，导致工作器件的产量非常低。该可扩展纳米制造 (SNM) 奖项旨在开发一种经济、可扩展、高产量的方法来生产基于 2D 电子材料的光电器件。 这项高度跨学科的研究依赖于纳米制造、电气工程、材料科学和计算等多个科学和工程学科来开发和优化制造工艺。 该研究将让许多背景和经验各异的年轻学者沉浸在高度协作和跨学科的研究环境中。利用二维电子材料制造器件的实验室过程采用“胶带”作为从块状晶体中剥离单层样品的方法并将它们转移到其他基材上。通常，第一剥离层由所需材料的多个 2D 层组成，需要重复胶带剥离以产生材料的单个单层。这种艰苦的过程不可扩展，而且通常产生的样品太小而无法制造设备。 最近，研究小组发现，共价或半共价键合到晶体表面层的金属薄膜可以用作改进的胶带。薄膜的特性使得在第一个剥离步骤中能够隔离横向尺寸达 0.5 毫米的单层样品。这一发现为开发可扩展的纳米制造方法来制造二维电子材料设备打开了大门。该奖项将结合理论和实验，确定用于原型二维材料剥离的金属薄膜的选择。利用这些薄膜，该项目将开发一种高度复合的弹性体冲压方法，以实现剥离过程的自动化，并展示基于二维电子材料的设备的可扩展制造，其应用范围从光电设备到化学传感器，以及作为其他材料的外延生长。

项目成果

Deterministic Assembly of Arrays of Lithographically Defined WS2 and MoS2 Monolayer Features Directly From Multilayer Sources Into Van Der Waals Heterostructures

• DOI: 10.1115/1.4045259
• 发表时间: 2019-11
• 期刊: Journal of Micro and Nano-Manufacturing
• 影响因子: 1
• 作者: Vu Nguyen;H. Gramling;Clarissa M. Towle;Wan Li;D. Lien;Hyungjin Kim;D. Chrzan;A. Javey;Ke Xu;J. Ager;H. Taylor

Theory of thin-film-mediated exfoliation of van der Waals bonded layered materials

• DOI: 10.1103/physrevmaterials.2.094004
• 发表时间: 2018-09
• 期刊: Physical Review Materials
• 影响因子: 3.4
• 作者: H. Sun;Eric W. Sirott;J. Mastandrea;H. Gramling;Yuzhi Zhou;M. Poschmann;H. Taylor;J. Ager;D. Chrzan