Process Modeling and Enhancements of Laser-Induced Plasma Micro-Machining (LIP-MM)

激光诱导等离子体微加工 (LIP-MM) 的工艺建模和增强

• 批准号: 1335014
• 负责人: Kornel Ehmann
• 金额: $ 30万
• 依托单位: Northwestern University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2013
• 资助国家: 美国
• 起止时间: 2013-09-01 至 2018-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1335014&HistoricalAwards=false
• 关键词: Process; Modeling; Enhancements; Laser; Induced

The focus of this research is to gain deeper insight into the physics of the new process of Laser Induced Plasma Micromachining, which promises better and faster micro-feature fabrication as compared to conventional micro-machining with a focused laser beam. Physics-based models will be formulated for the investigation of the mechanisms of plasma generation, plasma-matter interaction, and the prediction of machined feature geometry. New optical techniques and unique enhancements to this process, based on the optical manipulation of the shape of the plasma into plasma patterns rather than a spot, will be explored. This will increase process productivity and speed by at least one order of magnitude, and facilitate the fabrication of two- and three-dimensional geometries and patterns. Comprehensive experiments involving all aspects of the mechanics of the process will also be performed to validate the models developed. If successfully realized it is anticipated that the technology created by this project will enable major advances in critical areas of miniaturization technologies, given its multiple concomitant advantages such as its multi-materials capability, low heat-affected zone, high throughput, greater in-process flexibility and, most importantly, its pattern or feature/area-based rather than spot-based or writing nature of machining. This latter ability will result in significantly increased process throughput as compared to current focused laser beam based micro-manufacturing processes. Process capabilities will include the ability to generate high-accuracy features such as deep channels, dimples, through holes and other freeform structures on a variety of materials including metals, polymers, ceramics, composites and other transparent, reflective and brittle materials. The obtained results will also open doors for new research on non-lithography based single-step micro-manufacturing techniques for building and generating micro/meso-scale devices and patterns.

这项研究的重点是更深入地深入了解激光诱导的血浆微加工的物理学，与使用聚焦激光束相比，它有望更好，更快的微功能制造。基于物理学的模型将用于研究血浆产生，血浆 - 可能性相互作用的机理以及对加工特征几何形状的预测。将探索基于对等离子体模式而不是点的血浆形状的光学操纵，对该过程的新光学技术和独特的增强作用。这将使过程的生产率和速度至少提高一个数量级，并促进制造二维和三维的几何形状和模式。还将执行涉及该过程机制的各个方面的综合实验，以验证开发的模型。如果成功地意识到，预计该项目创建的技术将在微型化技术的关键领域中取得重大进步，鉴于其多个伴随的优势，例如其多物质能力，低热量影响区域，高吞吐量，高吞吐量，更大的过程中的灵活性，并且最重要的是，它的模式或基于区域/基于功能/基于底部或基于MACHANTANS MACHICANTIAN MACHANTANS MACHINALING MACHINDENIC MACHINDINAL的图案或功能/基于特征/基于功能。与当前聚焦激光束的微型制造过程相比，后一种能力将导致过程吞吐量显着增加。过程能力将包括能够通过各种材料上的孔和其他自由形式结构（包括金属，聚合物，陶瓷，复合材料和其他透明，反射性和脆性材料）生成高临界功能，例如深通道，酒窝和其他自由形式结构。获得的结果还将为基于非刻板学的单步微型制造技术进行新的研究打开大门，用于构建和生成微型/中间尺度的设备和模式。