SBIR Phase I: Monolithic Integration of LED Arrays and Silicon TFTs for Super High Brightness Microdisplays

SBIR 第一阶段：用于超高亮度微显示器的 LED 阵列和硅 TFT 单片集成

• 批准号: 1248774
• 负责人: Vincent Lee
• 金额: $ 15万
• 依托单位: Lumiode, Inc.
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2013
• 资助国家: 美国
• 起止时间: 2013-01-01 至 2013-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1248774&HistoricalAwards=false
• 关键词: SBIR; Phase; Monolithic; Integration; LED

This Small Business Innovation Program (SBIR) Phase I project aims to develop a new high brightness light engine platform by monolithically integrating high performance silicon transistors with compound semiconductor optoelectronic materials. Dense arrays of light emitting diodes (LEDs) have been previously fabricated to show the opportunity of using such arrays in microdisplay and projection concepts. However, without active control circuits, the ultimate brightness and resolution are limited. The technology developed in this SBIR uniquely allows for the fabrication of LED arrays with integrated control circuits on a single substrate enabling a light engine platform with high peak brightness (20,000,000 cd/m2), high dynamic range (from low light to outdoor sunlight), and high efficiency (80 lm/W). Prototype LED arrays have been fabricated, and the next step to realize this platform is the development of silicon circuitry to directly control the LED arrays. The anticipated results of this SBIR Phase I project are a low-temperature thin-film transistor fabrication process compatible with the LED arrays, appropriately scaled transistors, models of device performance and uniformity, and fully developed control circuits that will enable commercial demonstration devices. The broader impact/commercial potential of this project is the development of a light engine with a power efficiency, brightness, cost, and form factor unavailable in incumbent systems. In particular, three markets are identified where this technology significant advantages over current technologies, the $200 million microdisplay market, the $490 million pico-projector market, and the $2 billion projector market. This light engine platform offers a small form factor, long lifetime, environmental robustness, and high energy efficiency, and the high brightness required for sunlight readability. These features are necessary to create truly ubiquitous display devices and enable new see-through augmented reality experiences or smaller, more integrated projectors, not possible with current technologies. Commercialization of this device will impact all of these areas and enable a range of new downstream applications including other non-display industries, such as, 3D scanning and novel user interfaces.

该小型企业创新计划（SBIR）第一阶段项目旨在通过将高性能硅晶体管与化合物半导体光电材料单片集成来开发新型高亮度光引擎平台。先前已制造出密集的发光二极管 (LED) 阵列，以展示在微显示和投影概念中使用此类阵列的机会。然而，如果没有主动控制电路，最终的亮度和分辨率是有限的。该 SBIR 开发的技术独特地允许在单个基板上制造具有集成控制电路的 LED 阵列，从而实现具有高峰值亮度（20,000,000 cd/m2）、高动态范围（从弱光到室外阳光）、和高效率（80 lm/W）。 LED 阵列原型已经制作完成，实现该平台的下一步是开发直接控制 LED 阵列的硅电路。 SBIR 第一阶段项目的预期成果是与 LED 阵列兼容的低温薄膜晶体管制造工艺、适当缩放的晶体管、器件性能和均匀性模型以及能够实现商业演示器件的完全开发的控制电路。该项目更广泛的影响/商业潜力是开发一种光引擎，其功率效率、亮度、成本和外形尺寸是现有系统所不具备的。特别是，确定了该技术相对于现有技术具有显着优势的三个市场：2 亿美元的微型显示器市场、4.9 亿美元的微型投影仪市场和 20 亿美元的投影仪市场。该光引擎平台外形尺寸小、使用寿命长、环境稳健、能效高，并且具有阳光下可读性所需的高亮度。这些功能是创建真正无处不在的显示设备所必需的，并实现新的透明增强现实体验或更小、集成度更高的投影仪，这是当前技术不可能实现的。该设备的商业化将影响所有这些领域，并实现一系列新的下游应用，包括其他非显示行业，例如 3D 扫描和新颖的用户界面。