Ultrasonic Vibration Assisted NanoMachining for High-rate Tunable 2D and 3D Nanofabrication

用于高速可调谐 2D 和 3D 纳米加工的超声波振动辅助纳米加工

• 批准号: 1233176
• 负责人: Jingyan Dong
• 金额: $ 35.8万
• 依托单位: North Carolina State University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2012
• 资助国家: 美国
• 起止时间: 2012-09-15 至 2016-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1233176&HistoricalAwards=false
• 关键词: Ultrasonic; Vibration; Assisted; NanoMachining; rate

The objective of this research is to investigate a low cost, high speed, tunable NanoMachining approach using sharp cantilever tips with the help of ultrasonic vibration. The controllable ultrasonic vibration between the tip and the sample enables tunable fabrication of features across a wide dimensional range in one pass with high efficiency. This research incorporates process innovation and process modeling (empirical models for analysis of the nanomachining process with respect to material, geometric and process parameters) to create a novel manufacturing process for high rate nanofabrication. A high speed, high precision nanopositioning stage will be explored to fully utilize the high rate capabilities of the ultrasonic vibration assisted nanomachining process to create a novel manufacturing system, capable of high-throughput fabrication of 2D and 3D nanoscale features.If successful, the results of this research will advance the emerging nanomanufacturing industry by providing a low-cost, high-throughput method for the fabrication of 2D and 3D nanostructures. Considering the cost and high investment of other nanofabrication approaches (e.g. e-beam lithography, EUV-lithography), the results from this research will provide a transformative and efficient framework for the fabrication of nanoscale features and devices with the potential to contribute to many evolutionary products, such as nano-electronics, solar cells, photonics, and biomedical devices. Moreover, this research will integrate broad discoveries in nanotechnologies, nanofabrication, mechanics, process modeling, and instrumentation into a high rate, cost effective nanomanufacturing system. Meanwhile, the planned multidisciplinary research-based education program will link the research outcomes and students? activities to the needs of contemporary industry for nanotechnology, nanofabrication, and instrumentation. The research results will be broadly disseminated through technical publications, workshops, regular and short courses, and K-12 outreach program.

这项研究的目的是在超声波振动的帮助下，使用锋利的悬臂尖端研究低成本，高速，可调的纳米机械方法。尖端和样品之间可控的超声波振动，可以在一个通过以高效率的一通范围内对宽维范围内的特征进行调整。这项研究结合了过程创新和过程建模（用于材料，几何和过程参数分析纳米机加工过程的经验模型），以创建一个新的制造过程，以用于高速纳米纳米化。将探索一个高速，高精度的纳米定位阶段，以充分利用超声振动的高速率能力辅助纳米机械加工过程，以创建一个新型的制造系统，能够高通量制造2D和3D纳米级的特征。纳米结构。考虑到其他纳米制作方法的成本和高度投资（例如电子束光刻，EUV光刻），这项研究的结果将为制造纳米级特征和设备的制造提供一个变革性，高效的框架，有可能为许多进化产品贡献许多进化产品，例如纳米电子细胞，太阳能细胞，光子细胞，光子，光子，生物典型和生物性能。此外，这项研究将将纳米技术，纳米型，力学，过程建模和仪器的广泛发现整合到高速率，具有成本效益的纳米制造系统中。同时，计划的基于多学科的教育计划将联系研究成果和学生？当代工业需求的纳米技术，纳米制作和仪器的活动。研究结果将通过技术出版物，研讨会，常规和短期课程以及K-12外展计划大致传播。