MRI: Acquisition of a Nanoimprint Lithography System for Nanoscience Research and Education based on Low-Dimensional Materials

MRI：获取基于低维材料的纳米压印光刻系统，用于纳米科学研究和教育

• 批准号: 1040007
• 负责人: Eui-Hyeok Yang
• 金额: $ 17万
• 依托单位: Stevens Institute of Technology
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2011
• 资助国家: 美国
• 起止时间: 2011-01-01 至 2013-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1040007&HistoricalAwards=false
• 关键词: MRI; Acquisition; Nanoimprint; Lithography; System

The objective of this research is to acquire a Nanonex 1000 Nanoimprint Lithography System with high-resolution (~10 nm) and high-throughput (~60 sec) capabilities for use in low-dimensional nanoscale research and educational initiatives. The approach is to utilize the requested system for multidisciplinary research projects in nanotechnology and support educational initiatives underway at Stevens. Intellectual Merit The fabrication capabilities enhanced by the requested system will directly impact a variety of research projects spanning many emerging micro/nanotechnology and science areas. The requested system is a state-of-the-art nanolithography tool that will significantly enhance ongoing research projects centered in the multi-user Micro Device Laboratory at Stevens Institute of Technology, which currently lacks high-throughput nanopatterning capability. The acquisition of the requested system will therefore significantly enhance the efforts of currently funded research projects, while expanding the scope of emerging research activities. Broader Impacts The interdisciplinary research projects will provide the requested system a consistently growing user base, fostering a multidisciplinary research-intense learning environment in nanotechnology. This acquisition will also directly support educational initiatives underway at Stevens. The requested system will be highlighted in an ongoing NUE project, an innovative multimedia/web-based learning material development program seeking to incorporate both nanotechnology education and academic research into the undergraduate curriculum. Research enabled by the requested system will also be incorporated into graduate and undergraduate classes being developed and taught at Stevens. In this manner, the proposed acquisition will further foster integration of research and education through the educational initiatives and research activities at Stevens and our local collaborators.

这项研究的目的是获得具有高分辨率（〜10 nm）和高通量（〜60 sec）功能的Nanonex 1000纳米印刷印刷系统，用于低维纳米级研究和教育计划。这种方法是利用所请求的系统，用于纳米技术的多学科研究项目，并支持史蒂文斯正在进行的教育计划。知识分子值得所需系统增强的制造能力将直接影响许多涵盖许多新兴微/纳米技术和科学领域的研究项目。所请求的系统是一种最先进的纳米印刷工具，它将显着增强史蒂文斯技术学院多用户微型设备实验室的正在进行的研究项目，目前缺乏高通量纳米图案功能。因此，收购所请求的系统将显着增强当前资助的研究项目的努力，同时扩大新兴研究活动的范围。更广泛的影响跨学科研究项目将为所需的系统提供一个始终如一的用户群，从而促进了纳米技术中的多学科研究启动学习环境。此次收购还将直接支持史蒂文斯正在进行的教育计划。所请求的系统将在一个正在进行的NUE项目中强调，这是一项创新的多媒体/基于Web的学习材料开发计划，旨在将纳米技术教育和学术研究纳入本科课程中。由请求的系统启用的研究也将被纳入史蒂文斯（Stevens）开发和教授的研究生和本科课程中。通过这种方式，拟议的收购将通过史蒂文斯和我们的当地合作者的教育计划和研究活动进一步促进研究和教育的整合。