SBIR Phase II: Synthesis of Hard Magnetic Nanoparticles and Fabrication of Micromagnets for Microelectromechanical System (MEMS) Applications

SBIR 第二阶段：用于微机电系统 (MEMS) 应用的硬磁纳米颗粒的合成和微磁体的制造

• 批准号: 1026786
• 负责人: Jinfang Liu
• 金额: $ 50万
• 依托单位: Electron Energy Corporation
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2010
• 资助国家: 美国
• 起止时间: 2010-09-01 至 2012-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1026786&HistoricalAwards=false
• 关键词: SBIR; Phase; II; Synthesis; Hard

This Small Business Innovation Research (SBIR) Phase II project aims to develop anisotropic hard magnetic nanoparticles and nanoflakes based on rare-earth transition metal compounds, which can be agglomerated by screen printing and tape casting into micro- or sub-millimeter permanent magnet structures. The excellent magnetic properties, small size and particular morphology of the nanoparticles and nanoflakes will allow for high magnetic performance with dimensions that bridge the current gap between the permanent magnet thin films (about a few microns) and micromachined permanent magnets (typically larger than 500 microns). This project is expected to (1) synthesize permanent magnet nanoflakes and nanoparticles with magnetic properties comparable to those of the bulk counterparts, (2) prepare monolithic isotropic and anisotropic hard magnetic thick films by screen printing, (3) fabricate solitary isotropic and anisotropic hard magnetic thicker films or structures by tape casting, and (4) develop prototypes of sub-millimeter permanent magnet structures for terahertz (THz) devices and micro-undulators.The broader/commercial impact of this project will be the potential to provide stable permanent magnet particles with submicron dimensions in large amount and with close-to-bulk magnetic properties, which will be an enabling technology for the $3.9 billion magnetic MEMS (Microelectromechanical Systems) market. The applications include micro-sensors, -motors, -generators, -undulators, high frequency (THz) vacuum electronic devices etc. The permanent magnet nanoflakes can also be used in anisotropic bonded magnets, which have many industrial applications with a market size of $434 million per year worldwide.

该小型企业创新研究（SBIR）第二阶段项目旨在开发基于稀土过渡金属化合物的各向异性硬磁纳米粒子和纳米薄片，它们可以通过丝网印刷和流延成型成微米或亚毫米永磁结构。纳米颗粒和纳米薄片的优异磁性能、小尺寸和特殊形态将实现高磁性能，其尺寸可弥补永磁体薄膜（约几微米）和微加工永磁体（通常大于 500 微米）之间的电流间隙。 ）。 该项目预计：（1）合成具有与块体同类材料相当的磁性能的永磁纳米片和纳米颗粒，（2）通过丝网印刷制备单片各向同性和各向异性硬磁厚膜，（3）制造单独的各向同性和各向异性硬磁厚膜。通过流延法制备磁性较厚的薄膜或结构，以及（4）开发用于太赫兹（THz）设备和微波荡器的亚毫米永磁体结构的原型。更广泛/商业该项目的影响将是有可能提供大量亚微米尺寸且具有接近块状磁性的稳定永磁体颗粒，这将成为价值 39 亿美元的磁性 MEMS（微机电系统）市场的一项使能技术。 应用领域包括微型传感器、电机、发电机、波荡器、高频（THz）真空电子器件等。永磁纳米片还可用于各向异性粘结磁体，其具有许多工业应用，市场规模为434美元全球每年百万。