Planning Visit: U.S. - Japan Research on Effective Fast Robust Control of a Precision Planar Motion Stage for Manufacturing and Instruments

计划访问：美国-日本研究制造和仪器精密平面运动平台的有效快速鲁棒控制

• 批准号: 0940662
• 负责人: Sheng-Guo Wang
• 金额: $ 0.99万
• 依托单位: University of North Carolina at Charlotte
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2009
• 资助国家: 美国
• 起止时间: 2009-12-01 至 2012-05-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0940662&HistoricalAwards=false
• 关键词: Planning; Visit; U.S.; Japan; Research

One of the important areas in nanotechnology is nanoscale devices, manufacturing and measurement for advance of science, engineering and economy. Precision stage systems are widely used not only in semiconductor manufacturing systems and precision machine tools, but also in scanning-type measuring instruments such as coordinate measuring machines and surface measuring machines. These systems are required to have submicron to nanometer positioning resolution, but also high speed and long travel range in the presence of unavoidable uncertainties and disturbances, which is a challenge and a well-known difficulty in nanotechnology devices in broad manufacturing and instrumentation areas. Through this research planning visit, Prof. Sheng-Guo Wang from the UNC-Charlotte, together with Japan partner Prof. Wei Gao, Director of Nano-Metrology and Control Laboratory/Research Center at Tohoku University, will investigate precision stage systems, and develop a collaborative advanced practical research project to meet this challenge in nanotechnology by sharing their complementary expertise and research resources. Broader impacts include the international cooperation; training of U.S. graduate students by providing an early career introduction to collaborative international work in advanced areas in two leading industrial countries; and promotion of a mutually beneficial collaborative relationship.

纳米技术的重要领域之一是纳米级设备，制造和测量，以实现科学，工程和经济发展。 精确阶段系统不仅被广泛用于半导体制造系统和精确的机床中，而且在扫描类型的测量仪器中，例如坐标测量机和表面测量机。这些系统必须使纳米定位分辨率保持一余，但在不可避免的不确定性和干扰的情况下，高速和长途旅行范围也是纳米技术设备的挑战和众所周知的困难。通过这次研究计划访问，来自UNC-Charlotte的Sheng-Guo教授与日本合作伙伴Wei Gao教授，Tohoku University的Nano-Metrology and Control实验室/研究中心主任Wei Gao教授将调查精确的阶段系统，并开发一个协作高级实践研究项目，以分享Nanotechnology和Recorlentary Cornectary Corlentary Corlentagery和Research Cornectional的协作实用研究项目，以满足这一挑战。更广泛的影响包括国际合作；通过在两个领先工业国家的高级领域进行协作的早期职业介绍来培训美国研究生的培训；并促进互惠互利的合作关系。