Can Multi-Scale Optics be Fabricated by Ultraprecision Systems - Hierarchical Fabrication Across Seven Orders of Magnitude?

超精密系统能否制造多尺度光学器件——跨越七个数量级的分层制造？

• 批准号: 0927621
• 负责人: Matthew Davies
• 金额: $ 30万
• 依托单位: University of North Carolina at Charlotte
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2009
• 资助国家: 美国
• 起止时间: 2009-09-01 至 2013-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0927621&HistoricalAwards=false
• 关键词: Multi; Scale; Optics; Fabricated; Ultraprecision; Multi; Scale; Optics; Fabricated; Ultraprecision

The research objective of this award is to apply and extend position measurement techniques from the fields of scanned probe microscopy and optical lithography to solve the problem of relative tool positioning at the tens-of-nanometer level in precision five axis diamond machining. This will enable the fabrication of novel hierarchically integrated, monolithic, optical structures with size scales ranging from hundreds of millimeters down to hundreds of nanometers on a single component. The approach will be to create a fully compensated "machine-within-a-machine" with uncertainties that are an order of magnitude less than those of the original system using established thermal control and software error compensation techniques in precision engineering. Within this smaller work volume, a tool location system will be designed to locate the relative position of two single crystal diamond tools with sub-wavelength precision using a combination of low-force contact and non-contact sensors such as capacitance based air-bearing probes, quartz tuning forks, and oil immersion optical elements. The system will be tested by using one of the tools to manufacture a curved spherical or aspheric optical surface and the other to place an optically functional subwavelength pattern on that curved surface; a polarization sensitive lens is an easily tested example. If successful, this work will result in a paradigm for creating an innovative class of optics with functionality that cannot be achieved by other methods and will benefit such diverse areas as medical, military and energy technologies. This research has the potential to open up new commercial markets for optical devices. Thus, the overall program also targets multiple, integrated initiatives for research in education by leveraging existing, on-campus outreach efforts with the end goal of producing students that are trained to transfer the new technologies to industry and establish new commercial enterprises as appropriate.

该奖项的研究目标是从扫描的探针显微镜和光刻仪的领域应用和扩展位置测量技术，以在精确的五轴钻石加工中解决相对工具定位的问题。 这将使新型层次集成，整体式的光学结构的尺寸尺寸范围从数百毫米到一个单个成分上的数百纳米不等。 该方法将是创建一个完全补偿的“机器 - A-Machine”，其不确定性比使用Precision Engineering中已建立的热控制和软件误差补偿技术的原始系统的数量级要小。在此较小的工作量中，将设计一个工具位置系统，以定位具有低强度触点和非接触式传感器（例如基于电容的空气探针），石英调谐叉和油性光学元素的两种单晶钻石工具的相对位置。 该系统将通过使用其中一种工具来制造弯曲的球形或界面光学表面，而另一个工具将在该弯曲表面上放置光学功能性的亚波长图。极化敏感镜头是一个易于测试的示例。如果成功，这项工作将导致创建具有其他方法无法实现的创新的光学类别的范式，并将使医疗，军事和能源技术等各种领域受益。这项研究有可能为光学设备开放新的商业市场。 因此，整个计划还通过利用现有的校园外展工作来针对多种教育研究的综合计划，以最终的目标，以生产经过培训的学生，这些学生经过培训，可以将新技术转移到行业上，并适当建立新的商业企业。