SBIR Phase II: A High-Throughput Scanning Probe Microscope Using Micromachined Ultracompliant Probe Arrays with Embedded Sensors for Simultaneous Topography and Thermal Imag

SBIR 第二阶段：高通量扫描探针显微镜，采用微机械超顺应性探针阵列和嵌入式传感器，实现同步形貌和热成像

• 批准号: 0822810
• 负责人: Angelo Gaitas
• 金额: --
• 依托单位: Kytaro Inc.
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2008
• 资助国家: 美国
• 起止时间: 2008-08-01 至 2011-01-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0822810&HistoricalAwards=false
• 关键词: SBIR; Phase; II; Throughput; Scanning

This Small Business Innovation Research (SBIR) Phase II project aims to produce a commercial prototype of a state-of-the-art high throughput scanning probe microscope (HT-SPM), which can be used for measuring topography and thermal parameters in nanotechnology, bio, and semiconductor applications. The scanning probe microscope has been a very successful tool, but emphasis has not been put on rapid data acquisition. The HT-SPM is an enabling technology that consists of a transformative and patented method for extracting topography which allows for higher throughput. The project leverages experience in atomic force microscope (AFM) probe micro-fabrication and industry. An immediate outcome of this SBIR project will be a fully functional and market ready HT-SPM. The broader impact/commercial potential of measurements in nanometer scale devices and structures have both scientific and industrial importance. Although the Atomic Force Microscope (AFM) is one of the most important tools for nanotechnology, there has not been any fundamental innovation in the way it operates for more than a decade. This project provides faster measurement as a result of a fundamentally different way of imaging. Faster characterization permits manufacturers to expedite problem isolation, leading to higher productivity and higher return-on-investment (ROI). The HT-SPM also benefits R&D, failure analysis and off-line engineering. The HT-SPM offers critical capabilities that will allow users too quickly and clearly measure topography/friction/temperature at the nanoscale and view critical characteristics. The HT-SPM fills a critical need in integrated circuits, nanotechnology, life sciences and other markets that rely on sub-micron microscopy, as it will provide users with a superior and inexpensive measurement system to aid in studying new properties.

这项小型企业创新研究（SBIR）II期项目旨在生产最先进的高吞吐量扫描探针显微镜（HT-SPM）的商业原型，该原型可用于测量纳米技术，生物和半导体的应用中的地形和热参数。扫描探针显微镜一直是一个非常成功的工具，但是重点尚未快速获取。 HT-SPM是一种促成技术，它由一种用于提取地形的变革性和专利的方法组成，该方法可提供更高的吞吐量。该项目利用原子力显微镜（AFM）探针微型制造和工业的经验。这个SBIR项目的直接结果将是一个功能齐全的，市场就绪HT-SPM。纳米尺度设备和结构中测量的更广泛的影响/商业潜力具有科学和工业的重要性。尽管原子力显微镜（AFM）是纳米技术的最重要工具之一，但十多年来的运作方式没有任何基本创新。由于基本不同的成像方式，该项目提供了更快的测量。更快的表征允许制造商加快问题隔离，从而导致更高的生产率和更高的投资回报（ROI）。 HT-SPM还有益于研发，故障分析和离线工程。 HT-SPM提供了关键功能，可以使用户过于快速，清晰地测量纳米级的地形/摩擦/温度并查看关键特征。 HT-SPM满足了依赖亚微米显微镜的综合电路，纳米技术，生命科学和其他市场的关键需求，因为它将为用户提供卓越且廉价的测量系统，以帮助研究新物业。