MRI: Acquisition of a Thin Film Deposition System - Supporting Nanoscience and Nanotechnology Research and Education

MRI：购买薄膜沉积系统 - 支持纳米科学和纳米技术研究与教育

• 批准号: 0722660
• 负责人: Jun Jiao
• 金额: $ 29.46万
• 依托单位: Portland State University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2007
• 资助国家: 美国
• 起止时间: 2007-08-01 至 2009-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0722660&HistoricalAwards=false
• 关键词: MRI; Acquisition; Thin; Film; Deposition

The objective of this project is to acquire a thin film deposition (TFD) system to support funded research and to advance nanomaterials and nanofabrication development at Portland State University (PSU), as well as at surrounding institutions. The approach is that a KJLC AXXIS TFD system, capable of magnetron sputtering, electron beam deposition, thermal evaporation, ion beam-assisted deposition and substrate cleaning, will be installed at PSU's Center for Electron Microscopy and Nanofabrication (CEMN), a signature multi-user facility of Oregon Nanoscience and Microtechnologies Institute (ONAMI).The intellectual merit of this project is that the unique capabilities provided by the AXXIS TFD system, not currently available at any Oregon university, will enable researchers from ONAMI to conduct funded research and to initiate many nanoscience and nanotechnology related projects. In addition, it will stimulate collaboration among researchers across different university campuses in Oregon, creating new partnerships with local high-tech industry and improving the educational curriculum in thin film physics and surface coating technology for both graduate and undergraduate students. The new instrument will enhance the research infrastructure at PSU and ONAMI. The broader impact reflects the fact that more than two-dozen currently funded multi-disciplinary NSF, DOD, and DOE projects, representing more than 70 researchers, graduate and undergraduate students in 3 large universities in Oregon, will benefit directly from the new TFD system. The competitiveness and feasibility of many funded and new proposals by ONAMI members, covering areas from nanoelectronics, nanometrology, and nanofabrication to bioengineering, will be greatly enhanced.

该项目的目的是获得薄膜沉积（TFD）系统，以支持波特兰州立大学（PSU）以及周围机构的纳米材料和纳米制造开发。 The approach is that a KJLC AXXIS TFD system, capable of magnetron sputtering, electron beam deposition, thermal evaporation, ion beam-assisted deposition and substrate cleaning, will be installed at PSU's Center for Electron Microscopy and Nanofabrication (CEMN), a signature multi-user facility of Oregon Nanoscience and Microtechnologies Institute (ONAMI).The intellectual merit该项目的是，俄勒冈大学目前尚未提供Axxis TFD系统提供的独特功能，将使Onami的研究人员能够进行资助的研究并启动许多纳米科学和纳米技术相关的项目。此外，它将刺激俄勒冈州不同大学校园的研究人员之间的合作，与当地高科技行业建立新的合作伙伴关系，并为研究生和本科生改善薄膜物理和表面涂料技术的教育课程。新工具将增强PSU和Onami的研究基础设施。更广泛的影响反映了以下事实：目前有超过两人资助的多学科NSF，DOD和DOE项目，代表俄勒冈州3所大型大学的70多名研究人员，研究生和本科生，将直接从新的TFD系统中受益。 Onami成员的许多资助和新建议的竞争力和可行性将大大增强。