Collaborative Research: Micro- Lenses for Manufacturing

合作研究：用于制造的微透镜

• 批准号: 0500408
• 负责人: Amir Hirsa
• 金额: --
• 依托单位: Rensselaer Polytechnic Institute
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2005
• 资助国家: 美国
• 起止时间: 2005-04-15 至 2009-03-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0500408&HistoricalAwards=false
• 关键词: Collaborative; Research; Micro; Lenses; Manufacturing

The objective of this research is to develop the science base for tunable micro-lens arrays and explore their application for high throughput production. Tunable, millimeter-sized capillary lenses have recently been demonstrated by this group, with resolution approaching the maximum theoretical limit. The unique feature of these capillary lenses is that their tuning does not involve the movement of the contact line, where the fluids (the liquid that constitutes the lens and the gas surrounding it) meet the solid; contact line movement is avoided since it is a source of friction. The project will address two key issues: i) fast-response time and ii) small-scale packaging. The approach to meet the first challenge is to analyze shape changes in capillary lenses triggered via mechanical (pressure obtained by piezoelectric actuator) and electrical (electrokinetic) means. To address the second challenge, existing microfabrication techniques will be adapted and new ones developed for manufacturing capillary micro-lens arrays. For example, a novel technique may have to be developed to embed a porous medium in the middle of a glass chip for electrokinetic actuation. Micro-lens arrays will be studied at scales ranging from tens to hundreds of microns. The proposed research will ultimately make possible a technology to accurately control the minimum feature size by continuously adjusting the focal length of each micro-lens while the substrate is scanned underneath the array.This project is expected to impact technological development, since capillary micro-lenses can be used to manipulate light, enabling high volume production (manufacturing) of small scale devices. Specifically, realization of an individually tunable micro-lens array can lead to dynamic photolithography, which can be used for example on curved surfaces. This is a gateway to 3-dimensional patterning capability with sub-micrometer features. Furthermore, the multidisciplinary senior team is expected to provide a unique research opportunity for educating graduate and undergraduate students.

这项研究的目的是开发可调微镜头阵列的科学基础，并探讨其用于高吞吐量生产的应用。该组最近证明了可调的，毫米大小的毛细管镜头，分辨率接近最大的理论极限。这些毛细血管镜头的独特特征是，它们的调整不涉及接触线的运动，那里的流体（构成晶状体的液体和周围的气体）符合固体；避免接触线运动，因为它是摩擦的来源。该项目将解决两个关键问题：i）快速响应时间和ii）小规模包装。应对第一个挑战的方法是分析通过机械镜头（通过压电执行器获得的压力）和电（电动）均值触发的毛细管镜片的形状变化。为了应对第二项挑战，将对现有的微加工技术进行调整，并为制造毛细管微透镜阵列而开发了新的微加工技术。例如，可能必须开发出一种新型技术来将多孔介质嵌入玻璃芯片中间，以进行电动致动。微镜头阵列将以从数十到数百微米的尺度进行研究。拟议的研究最终将成为一项技术，可以通过在阵列下进行扫描时连续调节每个微镜头的焦距来准确控制最小特征尺寸，因为该项目有望影响技术开发，因为毛细管微镜头可用于操纵光线，从而实现高量生产（制造小规模设备）。具体而言，实现单独可调的微透镜阵列可以导致动态光刻学，例如在弯曲表面上使用。这是通往具有子微米特征的三维图案能力的门户。此外，预计多学科高级团队将为毕业生和本科生提供独特的研究机会。