Collaborative Research: Development Of Nano-Electrical Discharge Machining (NANO-EDM) For Advanced Manufacturing

合作研究：开发用于先进制造的纳米放电加工（NANO-EDM）

• 批准号: 0423697
• 负责人: Kamlakar Rajurkar
• 金额: $ 17.65万
• 依托单位: University of Nebraska-Lincoln
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2004
• 资助国家: 美国
• 起止时间: 2004-09-15 至 2008-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0423697&HistoricalAwards=false
• 关键词: Collaborative; Research; Development; Nano; Electrical

This grant provides funding to develop electrical discharge machining (EDM) process for nanometer scale cutting, "top-down" nanoscale machining. Initial experiments have successfully demonstrated feasibility of this technical approach to machine 40 nm (diameter) by 30 nm (deep) circular vias in atomically flat gold deposited on mica. Proposed nano-EDM process offers a unique and cogent opportunity to write precise nano structures, such as vias, at low cost (0.25 cent/hole according to current projection for a batch of 10x10 holes) and ultra high speed (currently the speed is 2 holes/minute for 25 nm dia x 15 nm deep hole), unlike the established processes such as focused ion-beam (FIB) and electron beam lithography (EBL). The investigators will explore theoretically and experimentally the role of process conditions and study effect of discharge energy density, voltage pulse duration, and discharge gap between the tool tip and the workpiece electrodes in various media. The unique collaboration between the U of A and UNL will bring interdisciplinary expertise and laboratory resources in related fields of nano mechanical machining, nano scale measurements, surface science and macro- and micro-EDM.The success of nano-EDM will practically allow the industry to work on gamut of electrically conducting as well as semiconducting materials in a non-vacuum environment. Nano-EDM will be instrumental for a wide range of emerging applications viz. nano vias for interconnects, single DNA detection device fabrication, etc. Further in the broader impact to the society, the PIs plan to introduce a course in the area of "Nano Mechanical Machining for Manufacturing". In the proposed research, the special emphasis will be to train underrepresented minorities. PIs will build partnerships with area schools and community colleges. Training is inevitable today, to the manufacturing community particularly in the Midwest, to create and retain new high paid nanomanufacturing related jobs in US.

这笔赠款为开发用于纳米级切割、“自上而下”纳米级加工的放电加工（EDM）工艺提供了资金。初步实验已成功证明了这种技术方法的可行性，可在云母上沉积的原子级平坦金上加工 40 nm（直径）× 30 nm（深）的圆形通孔。所提出的纳米 EDM 工艺提供了一个独特且令人信服的机会，可以以低成本（根据目前一批 10x10 孔的预测，每孔 0.25 美分）和超高速（目前速度为 2孔/分钟（25 nm 直径 x 15 nm 深孔），与聚焦离子束 (FIB) 和电子束光刻 (EBL) 等既定工艺不同。研究人员将从理论上和实验上探索工艺条件的作用，并研究各种介质中放电能量密度、电压脉冲持续时间以及刀尖与工件电极之间的放电间隙的影响。阿尔伯塔大学和内布拉斯加州大学之间的独特合作将带来纳米机械加工、纳米级测量、表面科学以及宏观和微观电火花加工相关领域的跨学科专业知识和实验室资源。纳米电火花加工的成功实际上将使该行业在非真空环境中研究各种导电和半导体材料。纳米电火花加工将有助于广泛的新兴应用，即：用于互连的纳米通孔、单个 DNA 检测设备制造等。为了进一步对社会产生更广泛的影响，PI 计划推出“制造业纳米机械加工”领域的课程。在拟议的研究中，特别强调的是培训代表性不足的少数群体。 PI 将与地区学校和社区大学建立合作伙伴关系。如今，对于制造业界来说，尤其是中西部的制造业，为了在美国创造和保留新的高薪纳米制造相关工作岗位，培训是不可避免的。