Sensors: Integrated Piezoresistive Sensing for Compliant Microdevices

传感器：用于兼容微型设备的集成压阻传感

• 批准号: 0428532
• 负责人: Timothy McLain
• 金额: $ 27万
• 依托单位: Brigham Young University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2004
• 资助国家: 美国
• 起止时间: 2004-08-01 至 2007-10-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0428532&HistoricalAwards=false
• 关键词: Sensors; Integrated; Piezoresistive; Sensing; Compliant

Abstract0428532PI: Timothy W. McLain Brigham Young UniversityThe integration of sensing capabilities into microdevices is a significant challenge because the sensors used are often larger than the devices they monitor. Compliant micromechanisms may provide a means of overcoming the difficulty associated with sensor integration in a variety of applications. Compliant microdevices use the deflection of flexible members to obtain their motion, which results in desirable characteristics at the micro level. These characteristics include manufacturability using existing methods, high-precision motion, and high reliability. A significant advantage of compliant mechanisms that has yet to be fully exploited is that they have physical properties that change as the device moves. Since their motion comes from strain in the compliant elements, any strain-sensitive properties of the material (such as electrical resistivity) will change as the device moves. This intrinsic sensing capability of compliant devices is an asset that this project intends to utilize in the control and function of micro devices. The concept of sensors intrinsic to compliant mechanisms is powerful and enabling for microelectromechanical systems (MEMS). Numerous applications could benefit from the functionality provided by this sensing concept including: micro-sized nanopositioners, non-contact force threshold detectors, force transducers for microdevices, reliable bistable microswitches, and nonvolatile noncontact mechanical memory.This is a project supported under Sensors Initiative NSF 04-522.

Abstract0428532PI：Timothy W. McLain Brigham Young University将传感功能整合到微发行版中是一个重大挑战，因为所使用的传感器通常比其监视的设备大。 兼容的微观力学可以提供一种克服与传感器集成在各种应用中相关的难度的方法。 兼容的微型版本使用柔性成员的偏转来获得其运动，从而在微观级别产生了理想的特征。 这些特征包括使用现有方法，高精度运动和高可靠性的制造性。 尚未充分利用的合规机理的一个重要优势是它们具有随着设备移动而变化的物理特性。 由于它们的运动来自符合元素中的应变，因此随着设备的移动，材料的任何应变敏感性（例如电阻率）都会改变。 兼容设备的这种内在感应能力是该项目打算在微型设备的控制和功能中使用的资产。 传感器固有到合规机制的概念具有强大的功能，并且对微机电系统（MEMS）具有启示性。 这种传感概念提供的功能可以受益，包括：微型纳米置剂，非接触力阈值探测器，用于微发频的力传感器，可靠可靠的微型微型开关和非挥发性的非接触机械记忆。这些是在传感器启动NSF NSF 044-522下支持的项目。