MRI: Acquisition of Major Instrumentation: Deep Reactive Ion Etching

MRI：购置主要仪器：深度反应离子蚀刻

• 批准号: 0421088
• 负责人: Jon-Paul Maria
• 金额: $ 30万
• 依托单位: North Carolina State University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2004
• 资助国家: 美国
• 起止时间: 2004-08-01 至 2005-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0421088&HistoricalAwards=false
• 关键词: MRI; Acquisition; Major; Instrumentation; Deep

This award from the Major Research Instrumentation program supports North Carolina State University with the acquisition of a state-of-the-art reactive ion etcher with the flexibility of an inductively coupled plasma. This instrumentation provides the institution with the ability to independently tune the chemical and physical etching mechanisms affording unparalleled ability to pattern anisotropically, rapidly, and selectively. Four general subject areas critical to the current and future research programs at NCSU will be enabled through this acquisition: (1) advanced integration strategies, (2) nano-scale patterning for nanoscience research, (3) microelectromechanical systems (MEMS), and (4) wide band-gap semiconductor research. Eleven faculty are designated as primary users with collective research groups comprising 50 graduate students and $5 millions in annual research expenditure. This instrumentation will benefit the associated research activities, and importantly, new and highly collaborative future programs will be developed and supported. This capability is expected to impact both the relevance and the sophistication of graduate and undergraduate student research. With these tools, the university will have a unique opportunity to influence a large number of students' education by teaching them how to use leading-edge capabilities to leverage their research, and offer hands-on experience to what will undoubtedly become a key tool of future nano-scientific endeavors.With this award from the Major Research Instrumentation program North Carolina State University with will acquire a state-of-the-art reactive ion etcher with the flexibility of an inductively coupled plasma. This instrument allows layers of material ranging between nanoscopic and millimeter thicknesses to be etched in the absence of liquid solvents. As an alternative to liquid etchants, reactive gas species in the plasma state accomplish this material removal. An important consequence of this mechanism is the ability to produce highly anisotropic structures, or features such as narrow pillars and ultra-thin walls. Such structures are critical to the fabrication of next generation nanoscale, microelectromechanical, optoelectronic and highly integrated devices which cannot be fabricated otherwise.Given the international environment of system and device-based research there exists a critical requirement for this equipment at North Carolina State University. Establishing this capability will help NCSU to maintain its position as a leading technical research institution. Faculty from three colleges and 11 departments are identified as primary users thus guaranteeing an academically diverse user base: collectively these users manage a research group comprising 50 graduate students and $5 millions in annual research expenditure. The proposed instrument will complement the existing set of microelectronics processing and fabrication equipment on the NCSU Centennial campus, and with NCSU's recent designation as affiliate of the National Nanotechnology Infrastructure Network, access to a broad section of the scientific community will be ensured

重大研究仪器计划的奖项通过收购最先进的反应离子蚀刻仪，支持北卡罗来纳州立大学，并具有电感耦合等离子体的灵活性。该仪器为机构提供了独立调整化学和物理蚀刻机制的能力，从而提供无与伦比的各向异性，快速和有选择性地对其进行模拟的能力。通过此次收购，将启用对NCSU当前和未来研究计划至关重要的四个一般主题领域：（1）高级集成策略，（2）纳米科学研究的纳米级构图，（3）微电力学系统（MEMS）和（4）（4）宽带GAP半径研究。十一位教职员工被指定为主要用户，由50名研究生和500万美元的年度研究支出组成的集体研究小组。该仪器将受益于相关的研究活动，重要的是，将制定和支持新的和高度协作的未来计划。预计这种能力将影响研究生和本科生研究的相关性和成熟程度。有了这些工具，大学将有一个独特的机会来通过教导他们如何利用领先的能力来利用他们的研究来影响大量学生的教育 等离子体。该仪器允许在没有液体溶剂的情况下蚀刻纳米镜和毫米厚度之间的材料层。作为液体蚀刻剂的替代方法，血浆状态中的反应性气体可以完成此材料去除。这种机制的重要结果是能够产生高度各向异性结构，或狭窄的支柱和超薄壁。这样的结构对于下一代纳米级，微机电，光电和高度集成的设备的制造至关重要。否则无法制造。启动了北卡罗来纳州立大学的基于系统和设备的研究的国际环境和基于设备的研究。建立此能力将有助于NCSU保持其作为领先的技术研究机构的地位。来自三所学院和11个系的教师被确定为主要用户，因此保证了学术上不同的用户群：共同管理一个研究小组，其中一个由50名研究生和500万美元的年度研究支出组成。该拟议的仪器将补充NCSU百年纪念校园上现有的微电子处理和制造设备，并通过NCSU最近的名称为国家纳米技术基础设施网络的分支机构，将确保获得广泛的科学社区的访问权限