NSF-Europe: Development and Characterization of Electrically-Active Interfaces for Chemical Sensors

NSF-Europe：化学传感器电活性接口的开发和表征

• 批准号: 0354939
• 负责人: Lisa Porter
• 金额: $ 30.54万
• 依托单位: Carnegie-Mellon University
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 2004
• 资助国家: 美国
• 起止时间: 2004-04-15 至 2007-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0354939&HistoricalAwards=false
• 关键词: NSF; Europe; Development; Characterization; Electrically

This project is a joint collaboration between Prof. Lisa Porter/Carnegie Mellon University (CMU) and Prof. Anita Lloyd Spetz from S-SENCE (Center for Sensor Technology) at Linkoping University, Linkoping, Sweden. The aim is through the combined collaborative expertise to push forward materials science understanding and subsequent development of high-temperature sensors, and to understand mechanisms that limit their performance. Examples of applications for these sensors include monitoring of selective catalytic reduction in automobile combustion engines and of flue gases from power plants. The approach is to develop and characterize ohmic contacts and insulators for SiC based chemical sensors that demonstrate substantial improvements in long-term stability at high temperatures (e.g., 300-800 C) required for optimum detection of certain gas species (e.g., hydrocarbons or NH3). Specifically, test devices (capacitors and Schottky diodes) will be fabricated based on contact and insulator materials, as well as associated processing conditions, developed by the CMU group. The devices will then be tested at S-SENCE for their gas sensor response at high temperatures. Initial research at Carnegie Mellon will consist of materials selection for ohmic contacts (e.g., TaC and PtSi), gate metals (e.g., Pt3Si) and gate insulator (e.g., SiO2 or AlN) followed by device fabrication. The devices will consist of TLM patterns for contact resistance measurements, MIS capacitors and Schottky diodes. The stability of these devices will then be measured using current-voltage (I-V) and/or capacitance-voltage (C-V) measurements as a function of both annealing temperature and measurement temperature. Selected samples will be sent, or brought, to S-SENCE for measurements of their gas response. This will be accomplished by mounting each sample onto a ceramic heater, which is attached to a 16-pin holder. After introducing specified gases into the assembly, the sensor response will be measured as the voltage at a constant current of 0.1 or 1 mA. Promising materials structures will be incorporated in MISiCFET devices. An important part of this research will include investigations of the morphology and interfacial chemistry and their relationship to the electrical properties of the sensors. The morphologies of the contact films will be characterized using scanning electron microscopy. The interfacial chemistry of the metal-insulator, insulator-semiconductor and metal-semiconductor will be characterized by Auger electron spectroscopy (AES), TEM, XRD and SIMS. %%% The project addresses fundamental research issues associated with electronic materials having technological relevance. An important feature of the project is the integration of research and education, and an international collaboration providing both scientific and educational benefits. Broader impacts associated with the project are exemplified by the education of undergraduate and graduate students in a unique technical, cultural and professional context. The approach includes: 1) graduate student exchange through visits to and from Sweden, 2) supervision of an undergraduate research project pertaining to chemical sensors, and 3) introduction of a lunch/speaker series designed to inspire and retain women graduate students and post-docs in materials science. This NSF project is a Cooperative Activity in Materials Research between the NSF and Europe (NSF 02-135).

该项目是Lisa Porter/Carnegie Mellon大学（CMU）和来自瑞典Linkoping University的S-Sence（传感器技术中心）的Anita Lloyd Spetz教授与Anita Lloyd Spetz教授之间的共同合作。目的是通过合并的协作专业知识来推动材料科学的理解和随后的高温传感器的开发，并了解限制其性能的机制。这些传感器的应用示例包括监测汽车燃烧发动机的选择性催化减少和发电厂的烟气气体。该方法是开发和表征基于SIC的化学传感器的欧姆接触和绝缘体，这些传感器证明了在高温下（例如300-800 c）在最佳检测某些气体物种（例如碳氢化合物或NH3）中所需的长期稳定性的实质改善。具体而言，将根据CMU组开发的接触和绝缘体材料以及相关的处理条件来制造测试设备（电容器和Schottky二极管）。然后，将在S-Sence测试这些设备在高温下的气体传感器响应。卡内基梅隆（Carnegie Mellon）的初步研究将包括欧姆接触（例如TAC和PTSI），栅极金属（例如PT3SI）和栅极绝缘子（例如SIO2或ALN）的材料选择。这些设备将包括用于接触性测量，MIS电容器和Schottky二极管的TLM模式。然后，将使用电流电压（I-V）和/或电容 - 电压（C-V）测量结果来测量这些设备的稳定性，这是退火温度和测量温度的函数。选定的样品将被发送或带到Sence，以测量其气体响应。这将通过将每个样品安装到陶瓷加热器上，该加热器连接到16针支架上。将指定的气体引入组件后，传感器响应将在0.1或1 mA的恒定电流下作为电压测量。有希望的材料结构将纳入Misicfet设备。这项研究的重要部分将包括对形态和界面化学的研究及其与传感器的电性能的关系。接触膜的形态将使用扫描电子显微镜进行表征。金属 - 绝缘体，绝缘体 - 肺导能器和金属 - 官方导体的界面化学将以螺旋钻电子光谱法（AES），TEM，XRD和SIMS为特征。 %%％该项目解决了与具有技术相关性的电子材料相关的基本研究问题。该项目的一个重要特征是研究和教育的整合，以及国际合作提供科学和教育益处。在独特的技术，文化和专业背景下，本科生和研究生的教育来说明与该项目相关的更广泛的影响。该方法包括：1）通过访问瑞典的访问，研究生交流，2）与化学传感器有关的本科研究项目的监督，以及3）引入午餐/扬声器系列，旨在激发和保留女性研究生和材料科学领域的女性研究生和博士后。这个NSF项目是NSF和欧洲之间材料研究的合作活动（NSF 02-135）。