Experiments With Dipole and Monopole Lenses for an SEM

用于 SEM 的偶极子和单极子透镜实验

• 批准号: 0096536
• 负责人: Albert Crewe
• 金额: $ 75.3万
• 依托单位: University of Chicago
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 2002
• 资助国家: 美国
• 起止时间: 2002-03-15 至 2007-02-28
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0096536&HistoricalAwards=false
• 关键词: Experiments; Dipole; Monopole; Lenses; SEM

An Instrument development grant has been awarded to Albert Crewe of the University of Chicago to complete, test, and demonstrate a new and originalscanning electron microscope (SEM), using a novel lens system, whose expectedperformance characteristics far exceed those of existing instruments. It is a dedicated low voltage, high resolution instrument that incorporates a permanent magnet lens, placed below the specimen. Such lenses have not been used previously but they show promise of permitting a considerable increase in resolution. The special value of these lenses are that they allow the use of very small focal lengths with correspondingly low aberrations. This makes it especially valuable for use with low accelerating voltages, although thelenses are not limited to this area. A second advantage is that simplified and more versatile column designs are allowed due to the post-specimen lens location. A third advantage is that the anticipated cost of the entire instrument, if made commercially, should be about half that of current high resolution scanning electron microscopes. Finally, the shape of the lens makes it easy to provide a large tilt angle for the specimen. The project involves the training of a number of students who will gain invaluable instrument design and development experience.

使用一种新型的镜头系统，芝加哥大学的阿尔伯特·克鲁（Albert Crewe）授予了一项仪器开发赠款，以完成，测试和演示一种新的和原始的电子显微镜（SEM），该电子显微镜（SEM）使用新颖的镜头系统，其预期性能的特征远远超过了现有仪器的特征。它是一种专用的低压高分辨率仪器，它包含放置在样品下方的永久磁铁镜头。 此类镜头以前尚未使用，但它们显示出允许大量分辨率增加的希望。这些镜头的特殊值是它们允许使用非常小的焦距和相应较低的焦点。这使得它对于与低加速电压的使用特别有价值，尽管Thelenses不限于该区域。第二个优点是，由于镜头后镜头的位置，允许简化和更通用的列设计。第三个优点是，如果商业上制造的整个仪器的预期成本应约为当前高分辨率扫描电子显微镜的一半。最后，镜头的形状使标本为标本提供较大的倾斜角变得容易。该项目涉及培训许多将获得宝贵的乐器设计和开发经验的学生。