SBIR Phase I: Low Voltage High Resolution Scanning Electron Microscope

SBIR 第一阶段：低压高分辨率扫描电子显微镜

• 批准号: 9760987
• 负责人: Albert Crewe
• 金额: $ 7.52万
• 依托单位: KPY2, Inc.
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1998
• 资助国家: 美国
• 起止时间: 1998-01-01 至 1998-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9760987&HistoricalAwards=false
• 关键词: SBIR; Phase; Low; Voltage; Resolution

*** 9760987 This Small Business Innovation Research Phase I project is for the construction of a low voltage SEM which uses a magnetic dipole lens as the objective lens. The theoretical performance of this design is far superior to any lens in current use. The lens consists of a permanently magnetized sphere. New materials are now available which make it feasible to use spheres of only a few mm in diameter and yet achieve a resolution superior to anything commercially available. Using this concept, we are in a position to fabricate SEMs which are lower in cost and higher in performance than any other instruments. The completed microscope will be used at research and development facilities for the imaging of biological specimens at high resolution. The microscope will also be extremely valuable for semiconductor chip inspection. ***

*** 9760987这个小型企业创新研究阶段I项目用于构建低压SEM，该低压SEM使用磁性偶极子镜头作为目标镜头。 该设计的理论性能远远超过当前使用中的任何镜头。 镜头由永久磁性球体组成。 现在可以使用新材料，这使得仅使用直径几毫米的球体可行，但要获得的分辨率优于市售的任何东西。使用这个概念，我们可以制造比任何其他乐器的成本且性能更高的SEMS。 完整的显微镜将用于研究和开发设施，以高分辨率的生物标本进行成像。 显微镜对于半导体芯片检查也将非常有价值。 ***