CAREER: Fundamental Investigations of Atmospheric-Pressure Glow Discharges

职业：大气压辉光放电的基础研究

• 批准号: 0093998
• 负责人: Laxminarayan Raja
• 金额: $ 40万
• 依托单位: Colorado School of Mines
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 2001
• 资助国家: 美国
• 起止时间: 2001-03-01 至 2002-04-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0093998&HistoricalAwards=false
• 关键词: CAREER; Fundamental; Investigations; Atmospheric; Pressure

The objective of this effort is to provide a rigorous understanding of atmospheric-pressure glow discharges (APGD). This new class of plasmas can produce large amounts of active chemical species near room temperature and atmospheric pressure and has potential to revolutionize plasma-based processing technologies. The research activities have the following components: (1) a computationally fast, one-dimensional physical model for prediction of APGD axial structure; (2) a two-dimensional model for investigating bulk flow/plasma dynamics interactions; (3) analysis of the electron energy distribution function using a homogeneous, time-dependent electron Boltzman solver; (4) a bench-scale APGD experiment to assist in model validation and to explore the discharge phenomena, including visual characterization of discharge modes to establish stability boundaries as a function of discharge geometry and operating parameters, and electrical characterization of the discharge; and (5) investigation of a novel APGD-based silicon oxidation process with potential application in ultrathin integrated circuit gate-oxide formation.

这项工作的目的是对大气压发光排放（APGD）进行严格的了解。 这类新的等离子体可以在室温和大气压附近产生大量的活性化学物种，并有可能彻底改变基于等离子体的加工技术。 研究活动具有以下组成部分：（1）用于预测APGD轴向结构的计算快速，一维物理模型； （2）一个用于研究批量流/等离子体动力学相互作用的二维模型； （3）使用均匀的，时间依赖的电子玻尔兹曼求解器分析电子能量分布函数； （4）一个台式APGD实验，以协助模型验证并探索排放现象，包括排出模式的视觉表征，以建立稳定性边界作为放电几何学和工作参数的函数，以及放电的电特性。 （5）对基于APGD的新型硅氧化过程进行研究，并在超薄整合电路栅极氧化物形成中使用潜在的应用。