Collaborative Research: A Diagnostic and Modeling Investigation of Pulsed PECVD

合作研究：脉冲 PECVD 的诊断和建模研究

• 批准号: 0829003
• 负责人: Laxminarayan Raja
• 金额: $ 22.67万
• 依托单位: University of Texas at Austin
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2008
• 资助国家: 美国
• 起止时间: 2008-08-01 至 2011-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0829003&HistoricalAwards=false
• 关键词: Collaborative; Research; Diagnostic; Modeling; Investigation

CBET-0829003RajaThe goal of this collaborative research project is to develop a fundamental understanding of pulsed plasma-enhanced chemical vapor deposition (PECVD) through a synergistic combination of advanced diagnostics and high-performance computer simulations. Low-frequency modulation of plasma power is critical to processes such as pulsed PECVD and plasma-enhanced atomic layer deposition (PE-ALD). These advanced deposition techniques impart nm-level control over thickness and composition that is critical to advancing nanotechnology. In particular, pulsed PECVD is being applied to oxide structures that have numerous applications as high-performance dielectrics, optical components, and diffusion barriers. However, process development is completely empirical at present. Time-resolved Langmuir probe, impedance spectroscopy, and emission spectroscopy will be coupled to state-of-the-art modeling in order to provide fundamental insights into the dynamics controlling the plasma chemistry in these systems. In pulsed PECVD the role of both neutrals (fluid flow, transport phenomena, gas- and surface chemistry) and activated species (ion, electrons, metastables) are of comparable importance. Coupled to the transient nature of the process, this challenging problem will require the development of novel techniques to both ensure high-fidelity measurements and to design tractable computational models. The modeling challenges will be addressed through transformative approaches to accelerate computations for plasma simulations with large number of species and chemical reactions. A shared-memory, data-parallel computing approach will be used to address plasma-simulation problems that typically have moderate-sized meshes but large degrees of freedom resulting from the large number of species and reactions. The systematic approach used to address this complex problem posed by pulsed PECVD will provide fundamental insight into both PE-ALD and conventional PECVD. The broader impacts of this work will also include the training of two PhD candidates and the engagement of undergraduate researchers in areas of great technological importance in a unique interdisciplinary environment. One student will focus on plasma modeling and simulation, while the second develops expertise in plasma diagnostics and deposition. These students, along with undergraduate REU participants, will work together in developing an integrated platform for the analysis of pulsed PECVD. The co-PIs will participate in established faculty outreach programs directed at underrepresented groups at the University of Texas Austin and Colorado School of Mines, working together to develop K-12 educational modules. They will also collaborate to develop and improve a graduate elective course on plasma processing.

该协作研究项目的CBET-0829003RAJATHE目标是通过高级诊断和高性能计算机模拟的协同组合来对脉冲血浆增强化学蒸气沉积（PECVD）进行基本了解。 等离子体功率的低频调节对于诸如脉冲PECVD和血浆增强原子层沉积（PE-ald）等过程至关重要。这些先进的沉积技术可赋予NM级控制厚度和组成，这对于推进纳米技术至关重要。尤其是，脉冲PECVD应用于具有许多应用的氧化物结构，该结构是高性能介电，光学成分和扩散屏障。但是，过程开发目前是完全经验的。时间分辨的Langmuir探针，阻抗光谱和发射光谱将耦合到最先进的建模，以便为控制这些系统中血浆化学的动力学提供基本的见解。在脉冲的PECVD中，两种中性（流体流动，传输现象，气体和表面化学）和活化物种（离子，电子，表示）的作用具有相当的重要性。结合过程的瞬时性质，这个具有挑战性的问题将需要开发新技术，以确保高保真测量和设计可拖延的计算模型。 建模挑战将通过变革性方法来解决，以加速具有大量物种和化学反应的血浆模拟。共享记忆，数据并行计算方法将用于解决通常具有中等大小的网格但由于大量物种和反应而产生的较大自由度的等离子体模拟问题。用于解决脉冲PECVD提出的这个复杂问题的系统方法将提供对PE-ALD和常规PECVD的基本见解。这项工作的更广泛影响还将包括对两名博士学位候选人的培训以及在独特的跨学科环境中具有巨大技术重要性领域的本科研究人员的参与。 一位学生将专注于等离子体建模和模拟，而第二个学生将在等离子体诊断和沉积方面发展专业知识。这些学生以及本科REU的参与者将共同开发一个集成平台，用于分析脉冲PECVD。该副作用将参加德克萨斯大学奥斯汀大学和科罗拉多大学矿业学校的既定教师外展计划，共同开发K-12教育模块。他们还将合作开发和改善有关等离子体处理的研究生选修课程。