SBIR Phase I: New, Reconfigurable Micro-elecro-mechanical System (MEMS) Based Grating for Optical Sensors

SBIR 第一阶段：用于光学传感器的新型可重构微机电系统 (MEMS) 光栅

• 批准号: 9661476
• 负责人: James Castracane
• 金额: $ 7.5万
• 依托单位: InterScience Inc
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1997
• 资助国家: 美国
• 起止时间: 1997-01-01 至 1997-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9661476&HistoricalAwards=false
• 关键词: SBIR; Phase; New; Reconfigurable; Micro

*** ABSTRACT 9661476 Castracane This Small Business Innovation Research Phase I project will establish the feasibility of producing a micro-electro-mechanical system (MEMS) based, reconfigurable optical grating. This new device will form the heart of the next generation of compact spectroscopic instruments. Fundamental research into the operation of such MEMS devices is required to optimize their operation and enable widespread applications. Specifically, this Phase I effort will focus on perfecting a MEMS grating array whose ruling spacing can be reconfigured in real time to allow for rapid, full spectral analysis of several passbands critical for accurate laboratory and field-ready sensor systems. Objectives include production and packaging of several prototype micro-gratings and measurement of switching performance, optical efficiency and spectral resolution. Exploiting the expertise that InterScience has developed in both electro-optic technology and the MEMS field, the Phase I research effort will attempt to establish the operation of such a MEMS grating and develop a design for its integration into a compact, optical domain spectroscopic system. This Phase I project will combine material, mechanical and optical research and development and pave the way for full implementation in Phase II. Commercial applications of the proposed research involve bringing fundamentally new spectroscopic instruments to market in areas such as atmospheric analysis, remote surveillance, and compact pressure and chemical sensing. In addition, there exist medical applications for this new instrument in innovative cardiac treatment modalities. ***

***摘要9661476 Castracane这个小型企业创新研究阶段I项目将确定生产基于微型机电系统（MEMS）的可行性，可重新配置的光学光栅。这种新设备将构成下一代紧凑型光谱仪器的核心。需要对此类MEMS设备运行的基本研究来优化其操作并启用广泛的应用程序。具体而言，这一阶段的工作将集中于完善一个MEMS光栅阵列，该阵列可以实时重新配置统治间距，以允许对几个通行带的快速，完整的光谱分析对于准确的实验室和现场准备的传感器系统至关重要。目标包括生产和包装几种原型微砂粒以及开关性能，光学效率和光谱分辨率的测量。 I阶段研究工作利用了Interscience在电力技术和MEMS领域都发展的专业知识，I阶段研究工作将试图建立这种MEMS光栅的运行，并为其整合到紧凑的光学域光谱系统中而开发设计。该阶段I项目将结合材料，机械和光学研发，并为II阶段的全面实施铺平道路。 拟议的研究的商业应用涉及在大气分析，远程监视以及紧凑的压力和化学传感等领域将新的光谱仪器带到市场上。 此外，该新工具在创新的心脏治疗方式中存在医学应用。 ***