Real Time Studies of the Evolution of Structural, Optical, and Electronic Properties in Thin Films

薄膜结构、光学和电子特性演变的实时研究

• 批准号: 9622774
• 负责人: Robert Collins
• 金额: $ 25.5万
• 依托单位: Pennsylvania State Univ University Park
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 1996
• 资助国家: 美国
• 起止时间: 1996-06-15 至 1999-01-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9622774&HistoricalAwards=false
• 关键词: Real; Time; Studies; Evolution; Structural

w:\awards\awards96\*.doc 9622774 Collins Real time spectroscopic ellipsometry (SE) and polarimetry, combined with microstructural analysis by direct techniques will be applied to characterize the nucleation, coalescence, and growth processes as well as the optical properties of thin films. The SE techniques applied here are unique in their ability to determine the optical properties and electronic structure with monolayer sensitivity as a continuous function of thickness for films fabricated by methods employed widely in industry, for example, plasma-enhanced chemical vapor deposition and magnetron sputtering. The research is divided into two projects: (I) the preparation of semiconductor films and the study of size effects in these films as they evolve from clusters through the coalescence stage to continuous growth, and (ii) the role of gas composition, substrate material, and substrate temperature on the evolution of bonding and structure in diamond films. The materials systems studied have a wide range of applications in thin film photovoltaic devices, photon and electron emission devices, and optical and mechanical coatings. As a result, synergistic relationships will be established between this program and other programs with industry for the transfer of new instrument designs, materials technologies, and human resources. %%% The growth of thin films under vacuum from vapor sources will be studied as they are formed, atomic layer-by-layer. Such studies will make use of novel, high-speed measurement techniques that involve directing a polarized white light beam into the reactor, reflecting it from the surface of the growing film, and detecting the change in polarization upon reflection. These techniques provide the thickness of the film with atomic layer sensitivity, the growth rate of the film, and its optical properties, t he latter including the index of refraction and absorption coefficient. The films to be studied include amorphous and crystalline semiconductors, with applications in optical and electronic devices such as solar cells and light-emitting diodes, and diamond with applications as optical, mechanical, and electron-emitting coatings. The program has four goals: (i) developing high sensitivity optical instrumentation, (ii) obtaining a better understanding of how thin films grow, (iii) optimizing thin films for specific applications based on this understanding, and (iv) establishing synergistic relationships between this program and other programs with industry for the transfer of new instrument designs, materials technologies, and human resources. ***

w:\awards\awards96\*.doc 9622774 Collins 实时光谱椭圆光度 (SE) 和偏振测量，与直接技术的微观结构分析相结合，将用于表征成核、聚结和生长过程以及薄层的光学特性电影。 这里应用的 SE 技术的独特之处在于，能够确定通过工业中广泛采用的方法（例如等离子体增强化学气相沉积和磁控溅射）制造的薄膜的光学特性和电子结构，单层灵敏度作为厚度的连续函数。 该研究分为两个项目：(i) 半导体薄膜的制备以及这些薄膜从簇演化到聚结阶段再到连续生长过程中的尺寸效应研究，以及(ii) 气体成分、基底材料的作用和基底温度对金刚石薄膜中键合和结构演变的影响。 研究的材料系统在薄膜光伏器件、光子和电子发射器件以及光学和机械涂层方面具有广泛的应用。 因此，该计划与其他工业计划之间将建立协同关系，以转移新仪器设计、材料技术和人力资源。 %%% 在真空下从蒸气源生长薄膜将在薄膜形成时逐层进行研究。此类研究将利用新颖的高速测量技术，包括将偏振白光束引导到反应器中，从生长薄膜的表面反射它，并检测反射时偏振的变化。 这些技术提供了具有原子层敏感性的薄膜厚度、薄膜的生长速率及其光学特性，后者包括折射率和吸收系数。 待研究的薄膜包括非晶和晶体半导体（应用于太阳能电池和发光二极管等光学和电子器件），以及金刚石（应用于光学、机械和电子发射涂层）。 该计划有四个目标：（i）开发高灵敏度光学仪器，（ii）更好地了解薄膜的生长方式，（iii）基于这种理解优化特定应用的薄膜，以及（iv）在薄膜之间建立协同关系该计划以及其他与工业界合作的计划，旨在转让新仪器设计、材料技术和人力资源。 ***