CAREER: Fabrication of Two- and Three-Dimensional Photonic Crystals

职业：二维和三维光子晶体的制造

• 批准号: 9501820
• 负责人: Theresa Mayer
• 金额: $ 34万
• 依托单位: Pennsylvania State Univ University Park
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 1995
• 资助国家: 美国
• 起止时间: 1995-08-01 至 2000-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9501820&HistoricalAwards=false
• 关键词: CAREER; Fabrication; Two; Three; Dimensional

9501820 Mayer The primary objective of this project is to stimulate and motivate learning at every level (undergraduate, graduate, post-graduate). In the area of fundamental research, the author proposes to develop a process to fabricate 2- and 3- dimensional (2- and 3-D) photonic crystals for optical wavelengths. The 3-D periodic dielectric structure that will be fabricated is a square-rod structure in the simple-cubic lattice. This scaffold structure has the property that all of the flat faces are at right angles to one another. Intuitively, this implies that the fabrication procedure for this square-rod structure will be much easier than those described for face-centered-cubic lattices. The proposed process relies on the integration of many techniques that are currently being used to fabricate III-V optoelectronic devices. In particular, the 3-D structure will be fabricated from a GaAs/A1As stack grown by molecular beam epitaxy (MBE). Following the growth, a submicron cross-hatched pattern is defined on the sample of the surface using electron-beam lithography. The unprotected areas of the GaAs/A1As stack are removed using reactive ion beam etching (RIBE). To complete the photonic crystal, the compositional structure of the A1As supports is modified and the alternating layers of A1As are removed in a selective etchant. En route to this 3-D result, a 2-D structure will also be fabricated. Both of these photonic crystals will be characterized by the transmission method. The successful demonstration of a 3-D photonic crystal at optical wavelengths would allow the development of a new class of devices that could be used to reflect, trap, guide, and switch light. ***

9501820 Mayer 该项目的主要目标是刺激和激励各个级别（本科生、研究生、研究生）的学习。 在基础研究领域，作者建议开发一种制造光学波长的 2 维和 3 维（2 和 3 维）光子晶体的工艺。 将要制造的 3D 周期性介电结构是简单立方晶格中的方杆结构。 该脚手架结构具有所有平面彼此成直角的特性。 直观上，这意味着这种方杆结构的制造过程将比面心立方晶格的制造过程容易得多。 所提出的工艺依赖于当前用于制造 III-V 光电器件的多种技术的集成。 特别是，3D 结构将由通过分子束外延 (MBE) 生长的 GaAs/AlAs 叠层制成。 生长后，使用电子束光刻在样品表面上定义亚微米交叉阴影图案。 使用反应离子束蚀刻 (RIBE) 去除 GaAs/AlAs 堆叠的未受保护区域。 为了完成光子晶体，需要修改 AlAs 支撑体的组成结构，并在选择性蚀刻剂中去除 AlAs 的交替层。 在获得 3D 结果的过程中，还将制造 2D 结构。 这两种光子晶体都将通过透射方法​​来表征。 光波长下 3D 光子晶体的成功演示将有助于开发出可用于反射、捕获、引导和开关光的新型器件。 ***