RESEARCH INITIATION AWARD: VLSI and Micromechanical Fabrication Process Synthesis

研究启动奖：超大规模集成电路和微机械制造工艺综合

• 批准号: 9309229
• 负责人: Carlos Mastrangelo
• 金额: $ 10万
• 依托单位: Regents of the University of Michigan - Ann Arbor
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1993
• 资助国家: 美国
• 起止时间: 1993-09-01 至 1996-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9309229&HistoricalAwards=false
• 关键词: RESEARCH; INITIATION; AWARD; VLSI; Micromechanical

9309229 Mastrangelo The object of this research is the development of analytical methods and computer tools for the automatic synthesis of VLSI and micromechanical fabrication processes. These tools take a geometrical description of a proposed device as input, decompose it into layers, and generate a description of the fabrication sequence and mask set using a systematic procedure. This research develops: (a) topological decomposition and reconstruction methods for two- and three-dimensional structures and (b) a computer program that implements the algorithms and interfaces to simulators and semiconductor equipment. The analytical methods use multilevel and multidimensional logic and determine fundamental questions of sequence uniqueness and minimality. These tools allow designers to practice concept-to manufacturing without knowledge of intermediate fabrication steps yet using fabrication sequences much more complex that those existent today. ***

9309229 Mastrangelo 这项研究的目的是开发用于自动合成 VLSI 和微机械制造工艺的分析方法和计算机工具。 这些工具将拟议器件的几何描述作为输入，将其分解为层，并使用系统程序生成制造顺序和掩模组的描述。 这项研究开发了：（a）二维和三维结构的拓扑分解和重建方法，以及（b）实现模拟器和半导体设备的算法和接口的计算机程序。 分析方法使用多层次和多维逻辑并确定序列唯一性和最小性的基本问题。 这些工具使设计人员能够在不了解中间制造步骤的情况下实践从概念到制造的过程，但使用的制造顺序比现有的制造顺序复杂得多。 ***