Acquisition of Rutherford Backscattering Analysis System

购置卢瑟福背向散射分析系统

• 批准号: 8714476
• 负责人: Bruce Dunn
• 金额: $ 15万
• 依托单位: University of California-Los Angeles
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1988
• 资助国家: 美国
• 起止时间: 1988-05-15 至 1990-04-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=8714476&HistoricalAwards=false
• 关键词: Acquisition; Rutherford; Backscattering; Analysis; System

Rutherford Backscattering Spectrometry (RBS) in particular has evolved into major analytical technique for thin film and complements that available from existing instrumentation which emphasizes either bulk characterization or surface analysis. RBS offers good elemental specificity. The compositional information is quantitative and the analysis is nondestructive. The research projects using the instrumentation are quite diverse, and indication of the growing interest in this technique within the materials science community. The major users of the equipment emphasize areas related to thin films, semiconductor materials and interfacial structures. Auxiliary users utilize RBS to characterize the materials and reactions involved in corrosion and segregation processes, in semiconductor technology and in plasma fusion applications. Substantial support from the university and industrial sources will contribute to the purchase of the RBS system.

特别是卢瑟福背散射光谱法 (RBS) 已发展成为薄膜的主要分析技术，并补充了现有仪器中强调本体表征或表面分析的技术。 RBS 具有良好的元素特异性。 成分信息是定量的，分析是非破坏性的。 使用该仪器的研究项目非常多样化，这表明材料科学界对这项技术的兴趣日益浓厚。 该设备的主要用户强调与薄膜、半导体材料和界面结构相关的领域。 辅助用户利用 RBS 来表征半导体技术和等离子体融合应用中的腐蚀和偏析过程中涉及的材料和反应。 大学和工业界的大力支持将有助于购买 RBS 系统。