Microfabrication of Contoured Surfaces by Electroplating

通过电镀对轮廓表面进行微加工

• 批准号: 8517474
• 负责人: John Angus
• 金额: $ 12.88万
• 依托单位: Case Western Reserve University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1986
• 资助国家: 美国
• 起止时间: 1986-05-15 至 1989-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=8517474&HistoricalAwards=false
• 关键词: Microfabrication; Contoured; Surfaces; Electroplating

The objective of this research is to develop a generalized fabrication technique for manufacture of three-dimensional contoured surfaces based on a process which uses thin polymeric films to precisely control local rates of electoplating and electrodissolution. The process provides a generalized method of transcribing any two-dimensional optical density map into a three-dimensional surface contour. The research will include experimental and theoretical investigations aimed at development of improved films used in this process, computer generation of the optical masks used to contour the films which in turn form a contoured final surface by means of electroplating or electrodissolution through the film, and extension on the method to include electroless plating and electrodissolution (of silicon) going beyond earlier electroplating work.

这项研究的目的是开发一种通用制造技术，用于制造三维轮廓表面，该过程基于一个过程，该过程使用薄的聚合膜来精确控制局部电镀和电溶液的局部速率。 该过程提供了将任何二维光密度映射转录为三维表面轮廓的广义方法。 这项研究将包括旨在开发此过程中使用的改进膜的实验和理论研究，用于轮廓膜的计算机生成，这些光面膜用于构造膜，而胶片又通过膜通过电镀或电气消散的方式形成了构成的最终表面，以及在包括电气板和电力（Silicon of Silicon of Silicon）的方法上扩展的。