大口径深曲面红外窗口硬质防护薄膜空间趋向性生长机理与调控

In recent years, with the development of high speed and ultra high speed flight platforms, higher requirements are put forward for antireflective and protective films deposited on the large aperture and deep curved infrared optical window with better imaging effect in large field of view. This research focuses on the basic problem of spatial orientation growth for the typical hard protective film deposited on the large aperture and deep curved infrared window. Based on the new composite growth technology, the spatial orientation growth mechanism, balance optimization and precise control technology of hard protective film are studied systematically. A wide-area dynamic correction theory model which can be used to describe and optimize the nucleation process of hard protective film is established. And it was used to reveal the microscopic physical mechanism of spatial orientation growth of hard protective film under the coupling action of multiple physical fields. The interdependence chain and the intrinsic influence mechanism between the spatial orientation growth, microstructure and film properties are established. The subject realizes the fine control of the spatial trend growth of hard protective film for large aperture deep curved window. The study of the project is of great significance to fill the gap in the theoretical research of the spatial orientation growth of the hard protective film deposited on the large aperture and deep curved infrared window, and it effectively promotes the integration and application of PECVD growth technology in high-speed flight platform.

近年来，随着高速和超高速飞行平台领域重大应用需求的不断提出，对具有较好大视场成像效果的大口径深曲面红外光学窗口增透防护薄膜提出了更高要求。课题围绕大口径深曲面红外窗口表面典型硬质防护薄膜材料空间趋向性生长这一基础科学问题，基于新型复合生长技术，系统开展窗口硬质防护薄膜空间趋向性生长机理、平衡优化与精确调控等理论和实验研究。通过建立可用于描述和优化大口径深曲面窗口硬质防护薄膜空间趋向性生长成核过程的广域动态修正理论模型，揭示多物理场耦合作用下，窗口硬质防护薄膜空间趋向性生长的微观物理机制；构建典型硬质防护薄膜材料空间趋向性生长-结构-性能三者之间的相互依存链条及其内在的影响传递规律；实现对大口径深曲面窗口硬质防护薄膜空间趋向性生长的精细调控。课题的开展对于填补目前大口径深曲面窗口硬质防护薄膜空间趋向性生长理论研究空白，有效促进PECVD生长技术在高速飞行平台的融合应用具有重要意义。

近年来，随着高速和超高速飞行平台领域重大应用需求的不断提出，对具有较好大视场成像效果的大口径深曲面红外光学窗口增透防护薄膜提出了更高要求。课题围绕大口径深曲面红外窗口表面典型硬质防护薄膜材料空间趋向性生长这一基础科学问题，基于新型复合生长技术，系统开展窗口硬质防护薄膜空间生长理论和实验研究。通过建立可用于描述和优化大口径深曲面窗口硬质防护薄膜空间趋分布规律的修正理论模型，揭示窗口硬质防护薄膜空间生长的基本规律；构建了典型硬质防护薄膜材料空间趋向性生长-结构-性能三者之间的相互依存链条及其内在的影响传递规律；实现对大口径深曲面窗口硬质防护薄膜空间生长的调控。课题的开展对于填补目前大口径深曲面窗口硬质防护薄膜空间趋向性生长理论研究空白，有效促进相关生长技术在高速飞行平台的融合应用具有重要意义。

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