基于工具磨损机理及其影响规律探索的气囊抛光工具时变去除特性抑制方法研究

Aiming at solving the commonly recognized challenge in the polishing process that, the poor machining efficiency resulted by the instability of the determination of workpiece material removal, an investigation whose research object is the bonnet polishing process of fused silica optical element is proposed in this application, with the idea that suppressing the time-variant removal characteristic of the bonnet tool to keep it stable in the polishing process, and therefore enhance the determination of workpiece material removal. Firstly, the exploration of the tool wear mechanism is carried out. Subsequently, a simulation study is conducted to establish the mapping relations between the tool wear characteristic and the interface parameters of the contacting zone between tool and workpiece, and also the influence on the tool material removal characteristic brought by its wear characteristic is revealed. Then, the prediction model for the critical wear state of the polishing tool is proposed. Finally, according to the theoretical studies above, the enhancement method for the determination of workpiece material removal by suppressing the time-variant removal characteristic is present, on the basis of the strategy that decelerates or compensates the tool wear by controlling of the manufacturing parameters, and the validated experiments are carried out to verify the above research contents. The research findings of this application would provide theoretical and technical support for improving the polishing efficiency of high precision optics, and finally achieve the purpose of promoting the machining level of high precision optical components.

为解决抛光过程中因工件的材料去除确定性不足，造成抛光效率低这一高精度光学元件抛光领域的共性问题，本项目拟以熔石英光学元件的气囊抛光过程为研究对象，以抑制因工具磨损产生的抛光工具去除特性的时变特征，使其在加工过程保持稳定，从而提高工件的材料去除确定性为思路，开展系统研究。项目将依次探索高精度光学元件气囊抛光过程中工具磨损的机理；构建抛光工具磨损与抛光工具去除特性的映射，揭示工具磨损对工具去除特性的影响规律，建立抛光工具的时变去除特性计算模型；研究抛光工具磨损失效的截止去除特性标定及抛光工具临界磨损失效状态预测。最后综合上述研究，提出基于加工参数控制的工具磨损延缓/补偿方法，来抑制抛光工具去除特性的时变性，使其在抛光过程保持稳定从而提高工件的材料去除确定性，并进行实验验证。项目的研究成果为从本质上提高高精度光学元件的抛光效率提供理论支撑，最终达到推动我国高精度光学元件批量化制造水平发展的目的。

为解决抛光过程中因工件的材料去除确定性不足，造成抛光效率低这一高精度光学元件抛光领域的共性问题，本项目以熔石英光学元件的气囊抛光过程为研究对象，以抑制因工具磨损产生的抛光工具去除特性的时变特征，使其在加工过程保持稳定，从而提高工件的材料去除确定性为思路，开展系统研究。项目依次开展了高精度光学元件气囊抛光过程工件材料去除机理优化、气囊抛光过程中工具磨损的机理、构建气囊抛光工具的时变去除特性计算模型、提出基于加工参数控制的工具磨损修整补偿方法，来抑制抛光工具去除特性的时变性，使其在抛光过程保持稳定从而提高工件的材料去除确定性，并进行实验验证。项目的研究成果为从本质上提高高精度光学元件的抛光效率提供一定的理论支撑，有助于推动我国高精度光学元件批量化制造水平发展的目的。

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