低形变高谐振耦合增强太赫兹波吸收效应与机理的研究

The absorption of terahertz (THz) wave by using the traditional room temperature terahertz focal plane micro-bridge is extremely low. In order to improve the THz wave absorption, this project is aimed at investigating a novel high resonance micro-bridge structure with multi-layer thin films. Furthermore, a multi-layer stress matching method for micro-bridge structure is planned to be proposed to mitigate the unnecessary deformation of thin films caused by the residual stress. The main research works of this project are scheduled as follows. (1) Exploring the resonance absorption mechanism of THz wave, and establishing the enhanced THz wave absorption model with high resonance micro-bridge structure. (2) Developing a multiple spin coating process, and manufacturing the high resonance micro-bridge structure by utilizing this process. (3) Establishing the stress matching model of multi-layer film, and carrying out simulation experiments on the residual stress of thin films and the deformation of high resonance cavity micro-bridge structure, using IntelliSuite software. This work expects to propose a micro-bridge detective structure with high THz wave absorption, on the basis of building the theoretical model of detecting THz wave with low deformation and high resonance, thus to further improve the theoretical research and application of microbolometer array THz imaging device with high performance.

为解决室温太赫兹焦平面阵列微桥结构对太赫兹波吸收极低的问题，本项目拟研究一种新型多层薄膜高谐振腔微桥结构，增强太赫兹波吸收性能；在此基础上，提出多层应力匹配法，减小高谐振腔微桥结构中多层薄膜间应力带来的微桥形变。研究内容及创新点如下：（1）揭示太赫兹波与谐振腔耦合吸收机制，建立高谐振腔微桥结构增强太赫兹波吸收模型；（2）开发多旋涂工艺，制备高谐振腔微桥结构；（3）建立高谐振腔多层薄膜应力匹配模型，利用IntelliSuite仿真软件，对薄膜应力与高谐振腔微桥形变进行仿真，得到微桥极小形变。在构建出的高谐振腔微桥结构探测太赫兹波理论模型的基础上，研制具有低形变高太赫兹波吸收率的微桥结构，为高性能室温太赫兹探测成像器件的研制奠定理论与技术基础。

太赫兹波的产生和检测是太赫兹科学研究和应用开发的重点，发展太赫兹探测技术，尤其是发展高性能室温太赫兹探测成像器件及成像系统是太赫兹技术的研究热点。本项目以提高传统微桥结构对太赫兹波的吸收性能为目标，以高谐振腔微桥结构下增强太赫兹波吸收性能以及在高谐振腔结构下微桥残余应力匹配问题为核心研究任务，探索高谐振耦合太赫兹波吸收机制与效应。研究适用于太赫兹波探测的高谐振腔微桥结构，通过建立理论模型与研究吸收机理，指导微桥结构的制备与吸收性能优化，解决传统微桥结构对太赫兹波吸收低的问题, 同时，为减小高谐振腔桥结构中多层薄膜微薄膜间应力带来的微桥形变，研究多层应力匹配法，减小高谐振腔时的微桥形变。在构建出的低形变高谐振腔微桥结构探测太赫兹波的理论模型的基础上，研制出具有高太赫兹波吸收率、形变极小的的微桥探测结构。

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